Atomic force microscopy of amorphous hydrogenated carbon–nitrogen films deposited by radio‐frequency‐plasma decomposition of methane–ammonia gas mixtures

1996 ◽  
Vol 14 (4) ◽  
pp. 2351-2355 ◽  
Author(s):  
R. Prioli ◽  
S. I. Zanette ◽  
A. O. Caride ◽  
D. F. Franceschini ◽  
F. L. Freire
Keyword(s):  
Atomic Force Microscopy ◽  
Radio Frequency ◽  
Radio Frequency Plasma ◽  
Ammonia Gas ◽  
Force Microscopy ◽  
Atomic Force ◽  
Frequency Plasma ◽  
Plasma Decomposition ◽  
Decomposition Of Methane ◽  
Amorphous Hydrogenated Carbon

Atomic Force Microscopy Studies of Carbon Nanostructures Grown by Radio Frequency Plasma Enhanced CVD (RF-PECVD)

2008 ◽  
Vol 3 (1) ◽  
pp. 32-35
Author(s):  
Ojas Mahapatra ◽  
R. Maheswaran ◽  
B. Purna Chandra Rao ◽  
C. Gopalakrishnan ◽  
D. John Thiruvadigal
Keyword(s):  
Atomic Force Microscopy ◽  
Radio Frequency ◽  
Carbon Nanostructures ◽  
Radio Frequency Plasma ◽  
Force Microscopy ◽  
Plasma Enhanced Cvd ◽  
Atomic Force ◽  
Frequency Plasma

scholarly journals Evidence of Carboxyl Modification of Hydrogen-Free Diamond-Like Carbon Films Assisted by Radio Frequency Plasma in Vacuum

2012 ◽  
Vol 2012 ◽  
pp. 1-6 ◽  
Author(s):  
Yuqi Xue ◽  
Zixin Wang ◽  
Jun Wang ◽  
Changji Hu ◽  
Fangyan Xie ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Carbon Films ◽  
Rf Plasma ◽  
Diamond Like Carbon ◽  
Spectra Analysis ◽  
Force Microscopy ◽  
Atomic Force ◽  
Frequency Plasma ◽  
Ft Ir

Modification of hydrogen-free diamond-like carbon (DLC) is presented, with acrylic acid (AA) vapor carried into a vacuum chamber by argon and with the in situ assistance of low-power radio frequency (RF) plasma at a temperature below 100°C. Measured by atomic force microscopy (AFM) technique, the roughness (Ra) of the DLC was 1.063±0.040 nm. XPS and FT-IR spectra analysis showed that carboxyl groups were immobilized on the surface of the DLC films, with about 40% of carboxyl group area coverage. It was found that the RF plasma and reaction time are important in enhancing the modification rate and efficiency.

1317 Decomposition of Methane Hydrate by Radio-Frequency Plasma

2013 ◽  
Vol 2013.51 (0) ◽  
pp. _1317-1_-_1317-2_
Author(s):  
Kensuke FUNADA ◽  
Putra Andi Erwin Eka ◽  
Shinobu MUKASA ◽  
Hiromichi TOYOTA ◽  
Shinfuku NOMURA
Keyword(s):  
Radio Frequency ◽  
Methane Hydrate ◽  
Radio Frequency Plasma ◽  
Frequency Plasma ◽  
Decomposition Of Methane

Growth of amorphous hydrogenated carbon nitride films in radio-frequency plasma

1999 ◽  
Vol 85 (5) ◽  
pp. 2904-2908 ◽  
Author(s):  
Mei Zhang ◽  
Yoshikazu Nakayama ◽  
Tsutomu Miyazaki ◽  
Masato Kume
Keyword(s):  
Radio Frequency ◽  
Carbon Nitride ◽  
Radio Frequency Plasma ◽  
Frequency Plasma ◽  
Amorphous Hydrogenated Carbon
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