In situ FTIR diagnostics of the radio-frequency plasma decomposition of N2O

T. A. Cleland; D. W. Hess

doi:10.1007/bf01030485

In situ FTIR diagnostics of the radio-frequency plasma decomposition of N2O

Plasma Chemistry and Plasma Processing ◽

10.1007/bf01030485 ◽

1987 ◽

Vol 7 (4) ◽

pp. 379-394 ◽

Cited By ~ 13

Author(s):

T. A. Cleland ◽

D. W. Hess

Keyword(s):

Radio Frequency ◽

Radio Frequency Plasma ◽

In Situ Ftir ◽

Frequency Plasma ◽

Plasma Decomposition

Download Full-text

Radio frequency plasma decomposition of ammonia: a comparison with radiation chemistry using the G value

The Journal of Physical Chemistry ◽

10.1021/j100144a015 ◽

1993 ◽

Vol 97 (42) ◽

pp. 10984-10988 ◽

Cited By ~ 15

Author(s):

George P. Miller ◽

James K. Baird

Keyword(s):

Radio Frequency ◽

Radiation Chemistry ◽

Radio Frequency Plasma ◽

Frequency Plasma ◽

Plasma Decomposition ◽

G Value

Download Full-text

In situ deposition and etching process of a-C:H:N films in a dual electron cyclotron resonance–radio frequency plasma

Diamond and Related Materials ◽

10.1016/s0925-9635(99)00263-0 ◽

2000 ◽

Vol 9 (3-6) ◽

pp. 573-576 ◽

Cited By ~ 22

Author(s):

Junegie Hong ◽

Agnès Granier ◽

Antoine Goullet ◽

Guy Turban

Keyword(s):

Radio Frequency ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Etching Process ◽

Radio Frequency Plasma ◽

In Situ Deposition ◽

Frequency Plasma

Download Full-text

Carbon Nanotube-Polypyrrole Composite Electrode Materials Produced In Situ by Electron Bombardment in Radio-Frequency Plasma Afterglows

Plasma Processes and Polymers ◽

10.1002/ppap.201300114 ◽

2013 ◽

Vol 11 (3) ◽

pp. 222-231 ◽

Cited By ~ 3

Author(s):

Leron Vandsburger ◽

Sylvain Coulombe ◽

Jean-Luc Meunier

Keyword(s):

Carbon Nanotube ◽

Radio Frequency ◽

Composite Electrode ◽

Electrode Materials ◽

Electron Bombardment ◽

Radio Frequency Plasma ◽

Frequency Plasma ◽

Polypyrrole Composite

Download Full-text

Polycrystalline silicon carbide films deposited by low‐power radio‐frequency plasma decomposition of SiF4‐CF4‐H2gas mixtures

Journal of Applied Physics ◽

10.1063/1.348450 ◽

1991 ◽

Vol 69 (7) ◽

pp. 3915-3923 ◽

Cited By ~ 23

Author(s):

Gautam Ganguly ◽

Subal C. De ◽

Swati Ray ◽

A. K. Barua

Keyword(s):

Silicon Carbide ◽

Low Power ◽

Radio Frequency ◽

Polycrystalline Silicon ◽

Radio Frequency Plasma ◽

Frequency Plasma ◽

Polycrystalline Silicon Carbide ◽

Plasma Decomposition

Download Full-text

In-situ doping of erbium in hydrogenated amorphous carbon by low temperature metalorganic radio frequency plasma enhanced chemical vapor deposition

Thin Solid Films ◽

10.1016/j.tsf.2014.02.038 ◽

2014 ◽

Vol 570 ◽

pp. 429-435 ◽

Cited By ~ 3

Author(s):

Hui-Lin Hsu ◽

Keith R. Leong ◽

Michael Halamicek ◽

I-Ju Teng ◽

Pratish Mahtani ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Radio Frequency ◽

Amorphous Carbon ◽

Vapor Deposition ◽

Chemical Vapor ◽

Radio Frequency Plasma ◽

Frequency Plasma ◽

Hydrogenated Amorphous

Download Full-text

New in situ measurement method for nanoparticles formed in a radio frequency plasma-enhanced chemical vapor deposition reactor

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.1404979 ◽

2001 ◽

Vol 19 (5) ◽

pp. 1998 ◽

Cited By ~ 18

Author(s):

Kwang Soo Seol ◽

Yasuyuki Tsutatani ◽

Toshiyuki Fujimoto ◽

Yoshiki Okada ◽

Kazuo Takeuchi ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Radio Frequency ◽

Vapor Deposition ◽

Measurement Method ◽

Chemical Vapor ◽

In Situ Measurement ◽

Radio Frequency Plasma ◽

Chemical Vapor Deposition Reactor ◽

Frequency Plasma

Download Full-text

Plasma polymerized electrospun PEDOT-S nanofibers obtained by in-situ radio frequency plasma treatment

2015 IEEE International Conference on Plasma Sciences (ICOPS) ◽

10.1109/plasma.2015.7179645 ◽

2015 ◽

Author(s):

Cigdem Dulgerbaki ◽

Melek Kiristi ◽

Aysegul Uygun Oksuz ◽

Ferhat Bozduman ◽

Lutfi Oksuz ◽

...

Keyword(s):

Radio Frequency ◽

Plasma Treatment ◽

Radio Frequency Plasma ◽

Frequency Plasma

Download Full-text

Atomic force microscopy of amorphous hydrogenated carbon–nitrogen films deposited by radio‐frequency‐plasma decomposition of methane–ammonia gas mixtures

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.580021 ◽

1996 ◽

Vol 14 (4) ◽

pp. 2351-2355 ◽

Cited By ~ 48

Author(s):

R. Prioli ◽

S. I. Zanette ◽

A. O. Caride ◽

D. F. Franceschini ◽

F. L. Freire

Keyword(s):

Atomic Force Microscopy ◽

Radio Frequency ◽

Radio Frequency Plasma ◽

Ammonia Gas ◽

Force Microscopy ◽

Atomic Force ◽

Frequency Plasma ◽

Plasma Decomposition ◽

Decomposition Of Methane ◽

Amorphous Hydrogenated Carbon

Download Full-text

Dually driven radio frequency plasma simulation with a three moment model

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.581324 ◽

1998 ◽

Vol 16 (4) ◽

pp. 2162-2172 ◽

Cited By ~ 33

Author(s):

Heon Chang Kim ◽

Vasilios I. Manousiouthakis

Keyword(s):

Radio Frequency ◽

Plasma Simulation ◽

Radio Frequency Plasma ◽

Frequency Plasma

Download Full-text

Modification of a Fur Semi-finished Sheepskins by Radio Frequency Plasma in an Inert Gas Medium

Journal of Physics Conference Series ◽

10.1088/1742-6596/1923/1/012020 ◽

2021 ◽

Vol 1923 (1) ◽

pp. 012020

Author(s):

E A Pankova ◽

F S Sharifullin ◽

G R Rakhmatullina ◽

R R Shagivalieva ◽

V S Zheltukhin

Keyword(s):

Radio Frequency ◽

Inert Gas ◽

Radio Frequency Plasma ◽

Frequency Plasma ◽

Gas Medium

Download Full-text