Atomic Force Microscopy Studies of Carbon Nanostructures Grown by Radio Frequency Plasma Enhanced CVD (RF-PECVD)

2008 ◽  
Vol 3 (1) ◽  
pp. 32-35
Author(s):  
Ojas Mahapatra ◽  
R. Maheswaran ◽  
B. Purna Chandra Rao ◽  
C. Gopalakrishnan ◽  
D. John Thiruvadigal
Keyword(s):  
Atomic Force Microscopy ◽  
Radio Frequency ◽  
Carbon Nanostructures ◽  
Radio Frequency Plasma ◽  
Force Microscopy ◽  
Plasma Enhanced Cvd ◽  
Atomic Force ◽  
Frequency Plasma

Synthesis of well-aligned carbon nanotubes by radio frequency plasma enhanced CVD method

2004 ◽  
Vol 13 (4-8) ◽  
pp. 1292-1295 ◽  
Author(s):  
Y. Yabe ◽  
Y. Ohtake ◽  
T. Ishitobi ◽  
Y. Show ◽  
T. Izumi ◽  
...  
Keyword(s):  
Carbon Nanotubes ◽  
Radio Frequency ◽  
Radio Frequency Plasma ◽  
Plasma Enhanced Cvd ◽  
Cvd Method ◽  
Aligned Carbon Nanotubes ◽  
Frequency Plasma

scholarly journals Evidence of Carboxyl Modification of Hydrogen-Free Diamond-Like Carbon Films Assisted by Radio Frequency Plasma in Vacuum

2012 ◽  
Vol 2012 ◽  
pp. 1-6 ◽  
Author(s):  
Yuqi Xue ◽  
Zixin Wang ◽  
Jun Wang ◽  
Changji Hu ◽  
Fangyan Xie ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Carbon Films ◽  
Rf Plasma ◽  
Diamond Like Carbon ◽  
Spectra Analysis ◽  
Force Microscopy ◽  
Atomic Force ◽  
Frequency Plasma ◽  
Ft Ir

Modification of hydrogen-free diamond-like carbon (DLC) is presented, with acrylic acid (AA) vapor carried into a vacuum chamber by argon and with the in situ assistance of low-power radio frequency (RF) plasma at a temperature below 100°C. Measured by atomic force microscopy (AFM) technique, the roughness (Ra) of the DLC was 1.063±0.040 nm. XPS and FT-IR spectra analysis showed that carboxyl groups were immobilized on the surface of the DLC films, with about 40% of carboxyl group area coverage. It was found that the RF plasma and reaction time are important in enhancing the modification rate and efficiency.

Optical Constants of Al-Doped Er2O3 Films Prepared by Radio Frequency Reactive Magnetron Sputtering

2010 ◽  
Vol 663-665 ◽  
pp. 361-364
Author(s):  
Yan Yan Zhu ◽  
Ze Bo Fang
Keyword(s):  
Atomic Force Microscopy ◽  
Refractive Index ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Optical Constants ◽  
Reactive Magnetron ◽  
X Ray Diffraction ◽  
X Ray ◽  
Force Microscopy ◽  
Atomic Force

Al doped Er2O3 films were deposited on Si(001) substrates by radio frequency magnetron technique. X-ray diffraction and atomic force microscopy show the Al doped Er2O3 films obtained are amorphous and uniform. The optical constants are studied which shows a proper value of refractive index and a lower reflectivity, indicating it could be a usefully material for solar cells.

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