Selectivity variations of electron beam patterned silicon dioxide films*

1994 ◽  
Vol 12 (4) ◽  
pp. 2457-2461 ◽  
Author(s):  
John F. Kimball ◽  
Patricia E. Allen ◽  
Dieter P. Griffis ◽  
Zbigniew J. Radzimski ◽  
Phillip E. Russell
Keyword(s):  
Electron Beam ◽  
Silicon Dioxide ◽  
Silicon Dioxide Films

True oxide electron beam induced current for low‐voltage imaging of local defects in very thin silicon dioxide films

1993 ◽  
Vol 63 (16) ◽  
pp. 2240-2242 ◽  
Author(s):  
W. S. Lau ◽  
D. S. H. Chan ◽  
J. C. H. Phang ◽  
K. W. Chow ◽  
K. S. Pey ◽  
...  
Keyword(s):  
Electron Beam ◽  
Silicon Dioxide ◽  
Low Voltage ◽  
Induced Current ◽  
Voltage Imaging ◽  
Silicon Dioxide Films ◽  
Electron Beam Induced Current ◽  
Thin Silicon ◽  
Local Defects

Measurements and Modelling of Thin Silicon Dioxide Films on Silicon

1989 ◽  
Author(s):  
A. Kalnitsky ◽  
S. P. Tay ◽  
J. P. Ellul ◽  
J. W. Andrews ◽  
E. A. Irene ◽  
...  
Keyword(s):  
Silicon Dioxide ◽  
Silicon Dioxide Films ◽  
Thin Silicon

Selection and characteristics of peptides that bind thermally grown silicon dioxide films

2005 ◽  
Vol 22 (5-6) ◽  
pp. 201-204 ◽  
Author(s):  
Edward Eteshola ◽  
Leonard J. Brillson ◽  
Stephen Craig Lee
Keyword(s):  
Silicon Dioxide ◽  
Silicon Dioxide Films ◽  
Thermally Grown

Characterization of Tunneling Current through Ultrathin Silicon Dioxide Films by Different-Metal Gates Method

2008 ◽  
Vol 47 (11) ◽  
pp. 8317-8320
Author(s):  
Takaaki Hirokane ◽  
Naoto Yoshii ◽  
Tatsuya Okazaki ◽  
Shinichi Urabe ◽  
Kazuo Nishimura ◽  
...  
Keyword(s):  
Silicon Dioxide ◽  
Tunneling Current ◽  
Metal Gates ◽  
Silicon Dioxide Films

scholarly journals Modeling the breakdown spots in silicon dioxide films as point contacts

1999 ◽  
Vol 75 (7) ◽  
pp. 959-961 ◽  
Author(s):  
J. Suñé ◽  
E. Miranda ◽  
M. Nafría ◽  
X. Aymerich
Keyword(s):  
Silicon Dioxide ◽  
Point Contacts ◽  
Silicon Dioxide Films
Sign in / Sign up

Export Citation Format

Share Document