Rapid photochemical deposition of silicon dioxide films using an excimer lamp

1994 ◽  
Vol 76 (7) ◽  
pp. 4372-4376 ◽  
Author(s):  
Philippe Bergonzo ◽  
Ian W. Boyd
Keyword(s):  
Silicon Dioxide ◽  
Excimer Lamp ◽  
Silicon Dioxide Films ◽  
Photochemical Deposition

Direct photo-deposition of silicon dioxide films using a xenon excimer lamp

1993 ◽  
Vol 69 (1-4) ◽  
pp. 393-397 ◽  
Author(s):  
P. Bergonzo ◽  
U. Kogelschatz ◽  
I.W. Boyd
Keyword(s):  
Silicon Dioxide ◽  
Excimer Lamp ◽  
Silicon Dioxide Films

Photo Induced Deposition of Thin Silicon Dioxide Films Using a Novel Large Area Excimer Lamp

1991 ◽  
Vol 224 ◽  
Author(s):  
P. Patel ◽  
U. Kogelschatz ◽  
P. Bergonzo ◽  
I. W. Boyd
Keyword(s):  
Thin Films ◽  
Silicon Dioxide ◽  
Low Temperatures ◽  
Ultra Violet ◽  
Large Area ◽  
Excimer Lamp ◽  
Silicon Dioxide Films ◽  
High Temperature Processing ◽  
Thin Silicon

AbstractThere is a growing interest in the deposition and processing of thin films at low temperatures to eliminate the inherent problems associated with high temperature processing. Photo enhanced processing is one of the techniques which has received considerable interest. One of the major limitations of photo processing is the lack of sufficiently intense ultra-violet (UV) sources. To date the low pressure Hg lamp has been the only available source for large area UV processing and this has limited the types and quality of films deposited.In this paper we will outline the design of a novel, variable wavelength excimer discharge lamp which can be used for depositing thin films over large substrate areas. We shall also discuss the direct (i.e. without intermediate photosensitisation reactions) photo induced deposition of thin silicon dioxide films using SiH4 and N2O which are photo dissociated by 126nm photons generated by the excimer lamp described.

Measurements and Modelling of Thin Silicon Dioxide Films on Silicon

1989 ◽  
Author(s):  
A. Kalnitsky ◽  
S. P. Tay ◽  
J. P. Ellul ◽  
J. W. Andrews ◽  
E. A. Irene ◽  
...  
Keyword(s):  
Silicon Dioxide ◽  
Silicon Dioxide Films ◽  
Thin Silicon

Selection and characteristics of peptides that bind thermally grown silicon dioxide films

2005 ◽  
Vol 22 (5-6) ◽  
pp. 201-204 ◽  
Author(s):  
Edward Eteshola ◽  
Leonard J. Brillson ◽  
Stephen Craig Lee
Keyword(s):  
Silicon Dioxide ◽  
Silicon Dioxide Films ◽  
Thermally Grown

Characterization of Tunneling Current through Ultrathin Silicon Dioxide Films by Different-Metal Gates Method

2008 ◽  
Vol 47 (11) ◽  
pp. 8317-8320
Author(s):  
Takaaki Hirokane ◽  
Naoto Yoshii ◽  
Tatsuya Okazaki ◽  
Shinichi Urabe ◽  
Kazuo Nishimura ◽  
...  
Keyword(s):  
Silicon Dioxide ◽  
Tunneling Current ◽  
Metal Gates ◽  
Silicon Dioxide Films

scholarly journals Modeling the breakdown spots in silicon dioxide films as point contacts

1999 ◽  
Vol 75 (7) ◽  
pp. 959-961 ◽  
Author(s):  
J. Suñé ◽  
E. Miranda ◽  
M. Nafría ◽  
X. Aymerich
Keyword(s):  
Silicon Dioxide ◽  
Point Contacts ◽  
Silicon Dioxide Films

Defect generation in 3.5 nm silicon dioxide films

1994 ◽  
Vol 65 (14) ◽  
pp. 1820-1822 ◽  
Author(s):  
D. A. Buchanan ◽  
D. J. DiMaria ◽  
C‐A. Chang ◽  
Y. Taur
Keyword(s):  
Silicon Dioxide ◽  
Defect Generation ◽  
Silicon Dioxide Films
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