Measurement and modeling of ion energy distribution functions in a low pressure argon plasma diffusing from a 13.56 MHz helicon source

1992 ◽  
Vol 10 (2) ◽  
pp. 398-403 ◽  
Author(s):  
C. Charles ◽  
R. W. Boswell ◽  
R. K. Porteous
Keyword(s):  
Energy Distribution ◽  
Argon Plasma ◽  
Low Pressure ◽  
Distribution Functions ◽  
Ion Energy ◽  
Ion Energy Distribution ◽  
Helicon Source ◽  
Energy Distribution Functions

Behavior of Time-Resolved Ion Energy Distribution Functions during Ion-Ion Instability

1993 ◽  
Vol 32 (Part 1, No. 10) ◽  
pp. 4756-4760
Author(s):  
Yoshifumi Saitou ◽  
Yoshiharu Nakamura ◽  
Masayoshi Tanaka ◽  
Akio Komori ◽  
Yoshinobu Kawai
Keyword(s):  
Energy Distribution ◽  
Distribution Functions ◽  
Time Resolved ◽  
Ion Energy ◽  
Ion Energy Distribution ◽  
Energy Distribution Functions
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