Ion energy distribution functions and Langmuir probe measurements in low pressure argon discharges

V. Kaeppelin; M. Carrère; J-M. Layet

doi:10.1116/1.1451274

Ion energy distribution functions and Langmuir probe measurements in low pressure argon discharges

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.1451274 ◽

2002 ◽

Vol 20 (2) ◽

pp. 526-529 ◽

Cited By ~ 5

Author(s):

V. Kaeppelin ◽

M. Carrère ◽

J-M. Layet

Keyword(s):

Energy Distribution ◽

Langmuir Probe ◽

Low Pressure ◽

Distribution Functions ◽

Ion Energy ◽

Ion Energy Distribution ◽

Langmuir Probe Measurements ◽

Energy Distribution Functions ◽

Probe Measurements

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Measurement and modeling of ion energy distribution functions in a low pressure argon plasma diffusing from a 13.56 MHz helicon source

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.578063 ◽

1992 ◽

Vol 10 (2) ◽

pp. 398-403 ◽

Cited By ~ 52

Author(s):

C. Charles ◽

R. W. Boswell ◽

R. K. Porteous

Keyword(s):

Energy Distribution ◽

Argon Plasma ◽

Low Pressure ◽

Distribution Functions ◽

Ion Energy ◽

Ion Energy Distribution ◽

Helicon Source ◽

Energy Distribution Functions

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Ion energy distribution functions in a dual-frequency low-pressure capacitively-coupled plasma: Experiments and particle-in-cell simulation

Plasma Sources Science and Technology ◽

10.1088/1361-6595/ac0da4 ◽

2021 ◽

Author(s):

Jun-Chieh Wang ◽

Peng Tian ◽

Jason Kenney ◽

Shahid Rauf ◽

Ihor Korolov ◽

...

Keyword(s):

Energy Distribution ◽

Low Pressure ◽

Distribution Functions ◽

Dual Frequency ◽

Ion Energy ◽

Capacitively Coupled ◽

Ion Energy Distribution ◽

Particle In Cell ◽

Cell Simulation ◽

Energy Distribution Functions

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Langmuir probe measurements in an inductively coupled plasma: Electron energy distribution functions in polymerizing fluorocarbon gases used for selective etching of SiO2

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.1474419 ◽

2002 ◽

Vol 20 (3) ◽

pp. 919-927 ◽

Cited By ~ 18

Author(s):

Freddy Gaboriau ◽

Marie-Claude Peignon ◽

Gilles Cartry ◽

Laetitia Rolland ◽

David Eon ◽

...

Keyword(s):

Energy Distribution ◽

Electron Energy ◽

Langmuir Probe ◽

Inductively Coupled Plasma ◽

Plasma Electron ◽

Distribution Functions ◽

Inductively Coupled ◽

Langmuir Probe Measurements ◽

Energy Distribution Functions ◽

Probe Measurements

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Ion energy distribution functions in magnetized capacitively coupled RF discharges

2013 Abstracts IEEE International Conference on Plasma Science (ICOPS) ◽

10.1109/plasma.2013.6634888 ◽

2013 ◽

Author(s):

Jan Trieschmann ◽

Mohammed Shihab ◽

Daniel Szeremley ◽

Abd Elfattah Elgendy ◽

Sara Gallian ◽

...

Keyword(s):

Energy Distribution ◽

Distribution Functions ◽

Ion Energy ◽

Capacitively Coupled ◽

Ion Energy Distribution ◽

Rf Discharges ◽

Energy Distribution Functions

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Behavior of Time-Resolved Ion Energy Distribution Functions during Ion-Ion Instability

Japanese Journal of Applied Physics ◽

10.1143/jjap.32.4756 ◽

1993 ◽

Vol 32 (Part 1, No. 10) ◽

pp. 4756-4760

Author(s):

Yoshifumi Saitou ◽

Yoshiharu Nakamura ◽

Masayoshi Tanaka ◽

Akio Komori ◽

Yoshinobu Kawai

Keyword(s):

Energy Distribution ◽

Distribution Functions ◽

Time Resolved ◽

Ion Energy ◽

Ion Energy Distribution ◽

Energy Distribution Functions

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Optical emission spectra and ion energy distribution functions in TiN deposition process by reactive pulsed magnetron sputtering

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2005.02.215 ◽

2005 ◽

Vol 200 (1-4) ◽

pp. 835-840 ◽

Cited By ~ 14

Author(s):

Yong M. Kim ◽

Yun M. Chung ◽

Min J. Jung ◽

J. Vlček ◽

J. Musil ◽

...

Keyword(s):

Magnetron Sputtering ◽

Energy Distribution ◽

Emission Spectra ◽

Optical Emission ◽

Deposition Process ◽

Distribution Functions ◽

Ion Energy ◽

Ion Energy Distribution ◽

Energy Distribution Functions ◽

Optical Emission Spectra

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Temporal evolution of ion energy distribution functions and ion charge states of Cr and Cr-Al pulsed arc plasmas

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.4926750 ◽

2015 ◽

Vol 33 (6) ◽

pp. 061301 ◽

Cited By ~ 6

Author(s):

Koichi Tanaka ◽

André Anders

Keyword(s):

Energy Distribution ◽

Temporal Evolution ◽

Distribution Functions ◽

Ion Energy ◽

Ion Energy Distribution ◽

Arc Plasmas ◽

Charge States ◽

Energy Distribution Functions ◽

Pulsed Arc

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Ion energy distribution functions in inductively coupled radio-frequency discharges—Mixtures of Cl2/BCl3/Ar

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.581491 ◽

1998 ◽

Vol 16 (6) ◽

pp. 3389-3395 ◽

Cited By ~ 19

Author(s):

C. A. Nichols ◽

J. R. Woodworth ◽

T. W. Hamilton

Keyword(s):

Energy Distribution ◽

Radio Frequency ◽

Distribution Functions ◽

Ion Energy ◽

Ion Energy Distribution ◽

Inductively Coupled ◽

Radio Frequency Discharges ◽

Energy Distribution Functions

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Charge-state-resolved ion energy distribution functions of cathodic vacuum arcs: A study involving the plasma potential and biased plasmas

Journal of Applied Physics ◽

10.1063/1.2561226 ◽

2007 ◽

Vol 101 (4) ◽

pp. 043304 ◽

Cited By ~ 31

Author(s):

André Anders ◽

Efim Oks

Keyword(s):

Energy Distribution ◽

Charge State ◽

Plasma Potential ◽

Distribution Functions ◽

Ion Energy ◽

Ion Energy Distribution ◽

Energy Distribution Functions

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Bimodal ion energy distribution functions in a hydrogen magnetized plasma

Plasma Sources Science and Technology ◽

10.1088/1361-6595/aaecc9 ◽

2019 ◽

Vol 28 (2) ◽

pp. 025010 ◽

Cited By ~ 1

Author(s):

Osvaldo Daniel Cortázar ◽

Ana Megía-Macías

Keyword(s):

Energy Distribution ◽

Distribution Functions ◽

Magnetized Plasma ◽

Ion Energy ◽

Ion Energy Distribution ◽

Energy Distribution Functions

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