Ion energy distribution functions in a multipole confined argon plasma diffusing from a 13.56‐MHz helicon source

1993 ◽  
Vol 11 (1) ◽  
pp. 157-163 ◽  
Author(s):  
C. Charles
1993 ◽  
Vol 32 (Part 1, No. 10) ◽  
pp. 4756-4760
Author(s):  
Yoshifumi Saitou ◽  
Yoshiharu Nakamura ◽  
Masayoshi Tanaka ◽  
Akio Komori ◽  
Yoshinobu Kawai

1983 ◽  
Vol 22 (Part 1, No. 2) ◽  
pp. 315-318 ◽  
Author(s):  
Kazuo Nakamura ◽  
Takemichi Satoh ◽  
Kazuo Toi ◽  
Naoji Hiraki ◽  
Yukio Nakamura ◽  
...  

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