Doppler shift measurements of ion energy distribution widths in an electron cyclotron resonance/multipole hybrid reactor

John Forster; C. Chris Klepper; Lee A. Berry; S. M. Gorbatkin

doi:10.1116/1.577873

Doppler shift measurements of ion energy distribution widths in an electron cyclotron resonance/multipole hybrid reactor

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.577873 ◽

1992 ◽

Vol 10 (5) ◽

pp. 3114-3118 ◽

Cited By ~ 10

Author(s):

John Forster ◽

C. Chris Klepper ◽

Lee A. Berry ◽

S. M. Gorbatkin

Keyword(s):

Energy Distribution ◽

Doppler Shift ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Hybrid Reactor ◽

Ion Energy ◽

Ion Energy Distribution

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Comparison of advanced plasma sources for etching applications. III. Ion energy distribution functions for a helicon and a multipole electron cyclotron resonance source

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.587760 ◽

1994 ◽

Vol 12 (4) ◽

pp. 2333 ◽

Cited By ~ 16

Author(s):

G. W. Gibson

Keyword(s):

Energy Distribution ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Distribution Functions ◽

Electron Cyclotron ◽

Ion Energy ◽

Plasma Sources ◽

Ion Energy Distribution ◽

Energy Distribution Functions

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Energy Distribution Functions of Ions Impacted on a Negatively Biased Substrate in an Electron Cyclotron Resonance Microwave Plasma

Japanese Journal of Applied Physics ◽

10.1143/jjap.38.4393 ◽

1999 ◽

Vol 38 (Part 1, No. 7B) ◽

pp. 4393-4396 ◽

Cited By ~ 3

Author(s):

Yasunori Ohtsu ◽

Keiichi Mori ◽

Hiroharu Fujita

Keyword(s):

Energy Distribution ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Microwave Plasma ◽

Distribution Functions ◽

Electron Cyclotron ◽

Energy Distribution Functions ◽

Resonance Microwave

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The influence of ion energy, ion flux, and etch temperature on the electrical and material quality of GaAs etched with an electron cyclotron resonance source

Journal of Applied Physics ◽

10.1063/1.360067 ◽

1995 ◽

Vol 78 (4) ◽

pp. 2712-2715 ◽

Cited By ~ 4

Author(s):

M. W. Cole ◽

K. K. Ko ◽

S. W. Pang

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Ion Flux ◽

Ion Energy ◽

Material Quality

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Electron energy distribution function by using probe method in electron cyclotron resonance multicharged ion source

Review of Scientific Instruments ◽

10.1063/1.4829738 ◽

2014 ◽

Vol 85 (2) ◽

pp. 02A925 ◽

Cited By ~ 13

Author(s):

Sho Kumakura ◽

Yosuke Kurisu ◽

Daiju Kimura ◽

Keisuke Yano ◽

Youta Imai ◽

...

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Cyclotron Resonance ◽

Electron Energy Distribution Function ◽

Electron Cyclotron Resonance ◽

Ion Source ◽

Electron Cyclotron ◽

Energy Distribution Function ◽

Electron Energy Distribution

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Experimental electron energy distribution function investigation at initial stage of electron cyclotron resonance discharge

Review of Scientific Instruments ◽

10.1063/1.3673012 ◽

2012 ◽

Vol 83 (2) ◽

pp. 02B504 ◽

Cited By ~ 8

Author(s):

S. V. Golubev ◽

I. V. Izotov ◽

D. A. Mansfeld ◽

V. E. Semenov

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Cyclotron Resonance ◽

Electron Energy Distribution Function ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Initial Stage

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PLASMA INSTABILITIES AND WAVE EXCITED BY AN ANISOTROPIC ENERGY DISTRIBUTION PRODUCED BY ELECTRON CYCLOTRON RESONANCE. Annual Progress Report.

10.2172/4739035 ◽

1969 ◽

Author(s):

J.L. Shohet

Keyword(s):

Energy Distribution ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Progress Report ◽

Electron Cyclotron ◽

Plasma Instabilities ◽

Anisotropic Energy ◽

Annual Progress Report

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PLASMA INSTABILITIES AND WAVES EXCITED BY AN ANISOTROPIC ENERGY DISTRIBUTION PRODUCED BY ELECTRON CYCLOTRON RESONANCE. Quarterly Progress Report No. 17.

10.2172/4001583 ◽

1971 ◽

Author(s):

J.L. Shohet

Keyword(s):

Energy Distribution ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Progress Report ◽

Electron Cyclotron ◽

Plasma Instabilities ◽

Anisotropic Energy

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Modeling of plasma density, argon ion energy and ion velocity functions in a dipolar electron cyclotron resonance plasma source

Vacuum ◽

10.1016/j.vacuum.2020.109215 ◽

2020 ◽

Vol 174 ◽

pp. 109215

Author(s):

Bin Zhang ◽

Xiaobing Zhang

Keyword(s):

Plasma Density ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Plasma Source ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Ion Energy ◽

Ion Velocity ◽

Argon Ion ◽

Resonance Plasma

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PLASMA INSTABILITIES AND WAVES EXCITED BY AN ANISOTROPIC ENERGY DISTRIBUTION PRODUCED BY ELECTRON CYCLOTRON RESONANCE. Quarterly Progress Report No. 14.

10.2172/4063490 ◽

1970 ◽

Author(s):

J.L. Shohet ◽

J.C. Sprott

Keyword(s):

Energy Distribution ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Progress Report ◽

Electron Cyclotron ◽

Plasma Instabilities ◽

Anisotropic Energy

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Calculation Of The Electron Energy Distribution Function In Electron Cyclotron Resonance Etching Plasmas

IEEE Conference Record - Abstracts. 1992 IEEE International Conference on Plasma ◽

10.1109/plasma.1992.697860 ◽

2005 ◽

Author(s):

M. Hussein ◽

G.A. Emmert ◽

N. Hershkowitz

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Cyclotron Resonance ◽

Electron Energy Distribution Function ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Energy Distribution Function ◽

Electron Energy Distribution

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