Comparison of advanced plasma sources for etching applications. III. Ion energy distribution functions for a helicon and a multipole electron cyclotron resonance source

1994 ◽  
Vol 12 (4) ◽  
pp. 2333 ◽  
Author(s):  
G. W. Gibson
Keyword(s):  
Energy Distribution ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Distribution Functions ◽  
Electron Cyclotron ◽  
Ion Energy ◽  
Plasma Sources ◽  
Ion Energy Distribution ◽  
Energy Distribution Functions

Behavior of Time-Resolved Ion Energy Distribution Functions during Ion-Ion Instability

1993 ◽  
Vol 32 (Part 1, No. 10) ◽  
pp. 4756-4760
Author(s):  
Yoshifumi Saitou ◽  
Yoshiharu Nakamura ◽  
Masayoshi Tanaka ◽  
Akio Komori ◽  
Yoshinobu Kawai
Keyword(s):  
Energy Distribution ◽  
Distribution Functions ◽  
Time Resolved ◽  
Ion Energy ◽  
Ion Energy Distribution ◽  
Energy Distribution Functions

Electron and Ion Energy Distribution Functions in Slide-Away Regime of TRIAM-1 Tokamak

1983 ◽  
Vol 22 (Part 1, No. 2) ◽  
pp. 315-318 ◽  
Author(s):  
Kazuo Nakamura ◽  
Takemichi Satoh ◽  
Kazuo Toi ◽  
Naoji Hiraki ◽  
Yukio Nakamura ◽  
...  
Keyword(s):  
Energy Distribution ◽  
Distribution Functions ◽  
Ion Energy ◽  
Ion Energy Distribution ◽  
Energy Distribution Functions
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