Electron energy distribution function by using probe method in electron cyclotron resonance multicharged ion source

Sho Kumakura; Yosuke Kurisu; Daiju Kimura; Keisuke Yano; Youta Imai; Fuminobu Sato; Yushi Kato; Toshiyuki Iida

doi:10.1063/1.4829738

Electron energy distribution function by using probe method in electron cyclotron resonance multicharged ion source

Review of Scientific Instruments ◽

10.1063/1.4829738 ◽

2014 ◽

Vol 85 (2) ◽

pp. 02A925 ◽

Cited By ~ 13

Author(s):

Sho Kumakura ◽

Yosuke Kurisu ◽

Daiju Kimura ◽

Keisuke Yano ◽

Youta Imai ◽

...

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Cyclotron Resonance ◽

Electron Energy Distribution Function ◽

Electron Cyclotron Resonance ◽

Ion Source ◽

Electron Cyclotron ◽

Energy Distribution Function ◽

Electron Energy Distribution

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Experimental electron energy distribution function investigation at initial stage of electron cyclotron resonance discharge

Review of Scientific Instruments ◽

10.1063/1.3673012 ◽

2012 ◽

Vol 83 (2) ◽

pp. 02B504 ◽

Cited By ~ 8

Author(s):

S. V. Golubev ◽

I. V. Izotov ◽

D. A. Mansfeld ◽

V. E. Semenov

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Cyclotron Resonance ◽

Electron Energy Distribution Function ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Initial Stage

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Calculation Of The Electron Energy Distribution Function In Electron Cyclotron Resonance Etching Plasmas

IEEE Conference Record - Abstracts. 1992 IEEE International Conference on Plasma ◽

10.1109/plasma.1992.697860 ◽

2005 ◽

Author(s):

M. Hussein ◽

G.A. Emmert ◽

N. Hershkowitz

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Cyclotron Resonance ◽

Electron Energy Distribution Function ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Energy Distribution Function ◽

Electron Energy Distribution

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Detection of electron energy distribution function anisotropy in a magnetized electron cyclotron resonance plasma by using a directional Langmuir probe

Physics of Plasmas ◽

10.1063/1.4890350 ◽

2014 ◽

Vol 21 (7) ◽

pp. 073510 ◽

Cited By ~ 3

Author(s):

T. Shikama ◽

H. Kitaoka ◽

M. Hasuo

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Langmuir Probe ◽

Cyclotron Resonance ◽

Electron Energy Distribution Function ◽

Electron Cyclotron Resonance ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Resonance Plasma

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Measurement of the electron energy distribution function by a Langmuir probe in an ITER-like hydrogen negative ion source

Nuclear Fusion ◽

10.1088/0029-5515/46/6/s11 ◽

2006 ◽

Vol 46 (6) ◽

pp. S307-S312 ◽

Cited By ~ 9

Author(s):

B Crowley ◽

D Homfray ◽

S.J Cox ◽

D Boilson ◽

H.P.L. de Esch ◽

...

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Langmuir Probe ◽

Electron Energy Distribution Function ◽

Ion Source ◽

Energy Distribution Function ◽

Negative Ion ◽

Electron Energy Distribution

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Experimental measurement of the electron energy distribution function in the radio frequency electron cyclotron resonance inductive discharge

Physical Review E ◽

10.1103/physreve.69.016406 ◽

2004 ◽

Vol 69 (1) ◽

Cited By ~ 17

Author(s):

ChinWook Chung ◽

S. S. Kim ◽

H. Y. Chang

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Radio Frequency ◽

Electron Energy ◽

Experimental Measurement ◽

Cyclotron Resonance ◽

Electron Energy Distribution Function ◽

Electron Cyclotron Resonance ◽

Energy Distribution Function ◽

Inductive Discharge

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Electron Energy Distribution Function of Pure Helium in Cyclotron Resonance

Journal of Applied Physics ◽

10.1063/1.1661473 ◽

1972 ◽

Vol 43 (5) ◽

pp. 2193-2196 ◽

Cited By ~ 1

Author(s):

C. K. Un ◽

B. C. Lutz

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Cyclotron Resonance ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Pure Helium

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Effect of non-uniform electron energy distribution function on plasma production in large arc driven negative ion source

Review of Scientific Instruments ◽

10.1063/1.3673485 ◽

2012 ◽

Vol 83 (2) ◽

pp. 02A719 ◽

Cited By ~ 5

Author(s):

T. Shibata ◽

S. Koga ◽

R. Terasaki ◽

T. Inoue ◽

M. Dairaku ◽

...

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Ion Source ◽

Energy Distribution Function ◽

Negative Ion ◽

Electron Energy Distribution ◽

Plasma Production

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On the role of electron energy distribution function in double frequency heating of electron cyclotron resonance ion source plasmas

Review of Scientific Instruments ◽

10.1063/1.4828708 ◽

2014 ◽

Vol 85 (2) ◽

pp. 02A919 ◽

Cited By ~ 3

Author(s):

L. Schachter ◽

K. E. Stiebing ◽

S. Dobrescu

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Cyclotron Resonance ◽

Electron Energy Distribution Function ◽

Electron Cyclotron Resonance ◽

Ion Source ◽

Double Frequency ◽

Frequency Heating

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Analysis of H atoms in a negative ion source plasma with the non-equilibrium electron energy distribution function

Review of Scientific Instruments ◽

10.1063/1.3673009 ◽

2012 ◽

Vol 83 (2) ◽

pp. 02A717

Author(s):

S. Koga ◽

T. Shibata ◽

R. Terasaki ◽

N. Kameyama ◽

A. Hatayama ◽

...

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Ion Source ◽

Energy Distribution Function ◽

Negative Ion ◽

Electron Energy Distribution ◽

Non Equilibrium

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Erratum: Electron energy distribution function of pure helium in cyclotron resonance

Journal of Applied Physics ◽

10.1063/1.1660915 ◽

1972 ◽

Vol 43 (10) ◽

pp. 4271-4271

Author(s):

C. K. Un ◽

B. C. Lutz

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Cyclotron Resonance ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Pure Helium

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