Experimental electron energy distribution function investigation at initial stage of electron cyclotron resonance discharge

2012 ◽  
Vol 83 (2) ◽  
pp. 02B504 ◽  
Author(s):  
S. V. Golubev ◽  
I. V. Izotov ◽  
D. A. Mansfeld ◽  
V. E. Semenov
2003 ◽  
Vol 42 (Part 1, No. 2A) ◽  
pp. 657-662 ◽  
Author(s):  
Kazuya Uehara ◽  
Akira Tsushima ◽  
Hiroshi Amemiya ◽  
Hisato Kawasima ◽  
Katsumichi Hoshino

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