Electron cyclotron resonance plasma experiment for in situ surface modification, deposition, and analysis

1992 ◽  
Vol 10 (6) ◽  
pp. 3419-3425 ◽  
Author(s):  
S. Nowak ◽  
P. Gröning ◽  
O. M. Küttel ◽  
M. Collaud ◽  
G. Dietler
Keyword(s):  
Surface Modification ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Plasma Experiment ◽  
Resonance Plasma

Characterization and in situ monitoring of a novel compact electron cyclotron resonance plasma source

1995 ◽  
Vol 66 (11) ◽  
pp. 5252-5256 ◽  
Author(s):  
Patrick O’Keeffe ◽  
C. O’Morain ◽  
S. Den ◽  
Y. Hayashi ◽  
S. Komuro ◽  
...  
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Plasma Source ◽  
Electron Cyclotron ◽  
In Situ Monitoring ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma

Surface Modification of Indium-tin Oxide Thin Films by Electron Cyclotron Resonance Plasma Treatment

Shinku ◽  
2003 ◽  
Vol 46 (5) ◽  
pp. 469-472
Author(s):  
Yoshiharu KAKEHI ◽  
Kazuo SATOH ◽  
Akihide KITABATAKE ◽  
Soichi OGAWA ◽  
Yoshiyuki NAKAJIMA ◽  
...  
Keyword(s):  
Thin Films ◽  
Surface Modification ◽  
Plasma Treatment ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma
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