Nondestructive characterization of nanoscale subsurface features fabricated by selective etching of multilayered nanowire test structures using Mueller matrix spectroscopic ellipsometry based scatterometry

2020 ◽  
Vol 38 (2) ◽  
pp. 024007
Author(s):  
Madhulika Korde ◽  
Subhadeep Kal ◽  
Cheryl Alix ◽  
Nick Keller ◽  
G. Andrew Antonelli ◽  
...  
Keyword(s):  
Spectroscopic Ellipsometry ◽  
Mueller Matrix ◽  
Selective Etching ◽  
Nondestructive Characterization

scholarly journals Nondestructive characterization of nitrogen‐implanted silicon‐on‐insulator structures by spectroscopic ellipsometry

1989 ◽  
Vol 66 (10) ◽  
pp. 5052-5057 ◽  
Author(s):  
M. Fried ◽  
T. Lohner ◽  
J. M. M. de Nijs ◽  
A. van Silfhout ◽  
L. J. Hanekamp ◽  
...  
Keyword(s):  
Spectroscopic Ellipsometry ◽  
Silicon On Insulator ◽  
Nondestructive Characterization
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