Nondestructive characterization of interface layers between Si or GaAs and their oxides by spectroscopic ellipsometry
1979 ◽
Vol 16
(5)
◽
pp. 1374-1378
◽
2003 ◽
2020 ◽
Vol 38
(2)
◽
pp. 024007
1983 ◽
Vol 44
(C10)
◽
pp. C10-247-C10-251