High-throughput process chain for single electron transistor devices based on field-emission scanning probe lithography and Smart Nanoimprint lithography technology

2019 ◽  
Vol 37 (2) ◽  
pp. 021603 ◽  
Author(s):  
Claudia Lenk ◽  
Yana Krivoshapkina ◽  
Martin Hofmann ◽  
Steve Lenk ◽  
Tzvetan Ivanov ◽  
...  
Keyword(s):  
Field Emission ◽  
High Throughput ◽  
Nanoimprint Lithography ◽  
Scanning Probe ◽  
Single Electron ◽  
Single Electron Transistor ◽  
Process Chain ◽  
Scanning Probe Lithography ◽  
Lithography Technology

scholarly journals In-plane gate single-electron transistor in Ga[Al]As fabricated by scanning probe lithography

1999 ◽  
Vol 75 (16) ◽  
pp. 2452-2454 ◽  
Author(s):  
S. Lüscher ◽  
A. Fuhrer ◽  
R. Held ◽  
T. Heinzel ◽  
K. Ensslin ◽  
...  
Keyword(s):  
Scanning Probe ◽  
Single Electron ◽  
Single Electron Transistor ◽  
Scanning Probe Lithography

Field-emission scanning probe lithography tool for 150 mm wafer

2018 ◽  
Vol 36 (6) ◽  
pp. 06JL06 ◽  
Author(s):  
Mathias Holz ◽  
Elshad Guliyev ◽  
Ahmad Ahmad ◽  
Tzvetan Ivanov ◽  
Alexander Reum ◽  
...  
Keyword(s):  
Field Emission ◽  
Scanning Probe ◽  
Scanning Probe Lithography

Room-temperature single dopant atom quantum dot transistors in silicon, formed by field-emission scanning probe lithography

2018 ◽  
Vol 124 (14) ◽  
pp. 144502 ◽  
Author(s):  
Zahid Durrani ◽  
Mervyn Jones ◽  
Faris Abualnaja ◽  
Chen Wang ◽  
Marcus Kaestner ◽  
...  
Keyword(s):  
Quantum Dot ◽  
Field Emission ◽  
Room Temperature ◽  
Scanning Probe ◽  
Dopant Atom ◽  
Scanning Probe Lithography

Simulation of field emission from volcano-gated tips for scanning probe lithography

2017 ◽  
Vol 177 ◽  
pp. 19-24 ◽  
Author(s):  
Steve Lenk ◽  
Marcus Kaestner ◽  
Claudia Lenk ◽  
Ivo W. Rangelow
Keyword(s):  
Field Emission ◽  
Scanning Probe ◽  
Scanning Probe Lithography

Silk as a biodegradable resist for field-emission scanning probe lithography

2020 ◽  
Vol 31 (43) ◽  
pp. 435303
Author(s):  
Mahmut Bicer ◽  
B Ganesh Kumar ◽  
Rustamzhon Melikov ◽  
I Bakis Dogru ◽  
Sadra Sadeghi ◽  
...  
Keyword(s):  
Field Emission ◽  
Scanning Probe ◽  
Scanning Probe Lithography

Field emission from diamond nanotips for scanning probe lithography

2018 ◽  
Vol 36 (6) ◽  
pp. 06JL02 ◽  
Author(s):  
Martin Hofmann ◽  
Claudia Lenk ◽  
Tzvetan Ivanov ◽  
Ivo W. Rangelow ◽  
Alexander Reum ◽  
...  
Keyword(s):  
Field Emission ◽  
Scanning Probe ◽  
Scanning Probe Lithography

Nanoscale lift-off process using field emission scanning probe lithography

2019 ◽  
Vol 37 (6) ◽  
pp. 061803
Author(s):  
Martin Hofmann ◽  
Stephan Mecholdt ◽  
Markus Mohr ◽  
Mathias Holz ◽  
Stefano Dallorto ◽  
...  
Keyword(s):  
Field Emission ◽  
Scanning Probe ◽  
Scanning Probe Lithography ◽  
Lift Off

Modeling a radio-frequency single-electron-transistor scanning probe

2014 ◽  
Vol 53 (8) ◽  
pp. 085001 ◽  
Author(s):  
Li Lü ◽  
Lina Su ◽  
Jiandong Sun ◽  
Xinxing Li ◽  
Hua Qin ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Scanning Probe ◽  
Single Electron ◽  
Single Electron Transistor
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