Field-emission scanning probe lithography tool for 150 mm wafer

2018 ◽  
Vol 36 (6) ◽  
pp. 06JL06 ◽  
Author(s):  
Mathias Holz ◽  
Elshad Guliyev ◽  
Ahmad Ahmad ◽  
Tzvetan Ivanov ◽  
Alexander Reum ◽  
...  
Keyword(s):  
Field Emission ◽  
Scanning Probe ◽  
Scanning Probe Lithography

Room-temperature single dopant atom quantum dot transistors in silicon, formed by field-emission scanning probe lithography

2018 ◽  
Vol 124 (14) ◽  
pp. 144502 ◽  
Author(s):  
Zahid Durrani ◽  
Mervyn Jones ◽  
Faris Abualnaja ◽  
Chen Wang ◽  
Marcus Kaestner ◽  
...  
Keyword(s):  
Quantum Dot ◽  
Field Emission ◽  
Room Temperature ◽  
Scanning Probe ◽  
Dopant Atom ◽  
Scanning Probe Lithography

Simulation of field emission from volcano-gated tips for scanning probe lithography

2017 ◽  
Vol 177 ◽  
pp. 19-24 ◽  
Author(s):  
Steve Lenk ◽  
Marcus Kaestner ◽  
Claudia Lenk ◽  
Ivo W. Rangelow
Keyword(s):  
Field Emission ◽  
Scanning Probe ◽  
Scanning Probe Lithography

Silk as a biodegradable resist for field-emission scanning probe lithography

2020 ◽  
Vol 31 (43) ◽  
pp. 435303
Author(s):  
Mahmut Bicer ◽  
B Ganesh Kumar ◽  
Rustamzhon Melikov ◽  
I Bakis Dogru ◽  
Sadra Sadeghi ◽  
...  
Keyword(s):  
Field Emission ◽  
Scanning Probe ◽  
Scanning Probe Lithography

Field emission from diamond nanotips for scanning probe lithography

2018 ◽  
Vol 36 (6) ◽  
pp. 06JL02 ◽  
Author(s):  
Martin Hofmann ◽  
Claudia Lenk ◽  
Tzvetan Ivanov ◽  
Ivo W. Rangelow ◽  
Alexander Reum ◽  
...  
Keyword(s):  
Field Emission ◽  
Scanning Probe ◽  
Scanning Probe Lithography

Nanoscale lift-off process using field emission scanning probe lithography

2019 ◽  
Vol 37 (6) ◽  
pp. 061803
Author(s):  
Martin Hofmann ◽  
Stephan Mecholdt ◽  
Markus Mohr ◽  
Mathias Holz ◽  
Stefano Dallorto ◽  
...  
Keyword(s):  
Field Emission ◽  
Scanning Probe ◽  
Scanning Probe Lithography ◽  
Lift Off

scholarly journals Investigations on Long-Range AFM Scans Using a Nanofabrication Machine (NFM-100)

Proceedings ◽  
2020 ◽  
Vol 56 (1) ◽  
pp. 34
Author(s):  
Jaqueline Stauffenberg ◽  
Ingo Ortlepp ◽  
Christoph Reuter ◽  
Mathias Holz ◽  
Denis Dontsov ◽  
...  
Keyword(s):  
Atomic Force Microscope ◽  
Long Range ◽  
Field Emission ◽  
Scanning Probe ◽  
Measuring System ◽  
Scanning Probe Lithography ◽  
Nano Fabrication ◽  
Atomic Force

The focus of this work lies on investigations on a new Nano Fabrication Machine (NFM-100) with a mounted atomic force microscope (AFM). This installed tip-based measuring system uses self-sensing and self-actuated microcantilevers, which can be used especially for field-emission scanning probe lithography (FESPL). The NFM-100 has a positioning range of Ø 100 mm, which offers, in combination with the tip-based measuring system, the possibility to analyse structures over long ranges. Using different gratings, the accuracy and the reproducibility of the NFM-100 and the AFM-system will be shown.

scholarly journals Fabrication of optical nanodevices through field-emission scanning probe lithography and cryogenic etching

2018 ◽  
Author(s):  
Martin Hofmann ◽  
Cemal Aydogan ◽  
Ivo W. Rangelow ◽  
Mahmut Bicer ◽  
Arda D. Yalcinkaya ◽  
...  
Keyword(s):  
Field Emission ◽  
Scanning Probe ◽  
Scanning Probe Lithography

Nanopatterning on calixarene thin films via low-energy field-emission scanning probe lithography

2018 ◽  
Vol 29 (32) ◽  
pp. 325301 ◽  
Author(s):  
Xiaoyue He ◽  
Peng Li ◽  
Pengchong liu ◽  
Xiaoxian Zhang ◽  
Xiangqian Zhou ◽  
...  
Keyword(s):  
Thin Films ◽  
Field Emission ◽  
Low Energy ◽  
Scanning Probe ◽  
Scanning Probe Lithography ◽  
Energy Field

Nanofabrication by field-emission scanning probe lithography and cryogenic plasma etching

2018 ◽  
Vol 192 ◽  
pp. 77-82 ◽  
Author(s):  
Claudia Lenk ◽  
Martin Hofmann ◽  
Steve Lenk ◽  
Marcus Kaestner ◽  
Tzvetan Ivanov ◽  
...  
Keyword(s):  
Field Emission ◽  
Plasma Etching ◽  
Scanning Probe ◽  
Scanning Probe Lithography
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