Ab initio analysis of nucleation reactions during tungsten atomic layer deposition on Si(100) and W(110) substrates

2018 ◽  
Vol 36 (6) ◽  
pp. 061507 ◽  
Author(s):  
Mariah J. King ◽  
Patrick L. Theofanis ◽  
Paul C. Lemaire ◽  
Erik E. Santiso ◽  
Gregory N. Parsons
Keyword(s):  
Atomic Layer Deposition ◽  
Ab Initio ◽  
Atomic Layer ◽  
Layer Deposition

An Ab Initio Evaluation of Cyclopentadienyl Precursors for the Atomic Layer Deposition of Hafnia and Zirconia

2019 ◽  
Vol 11 (7) ◽  
pp. 113-121 ◽  
Author(s):  
Aleksandra Zydor ◽  
Simon Elliott ◽  
Thomas Leese ◽  
Fuquan Song ◽  
Simon Rushworth
Keyword(s):  
Atomic Layer Deposition ◽  
Ab Initio ◽  
Atomic Layer ◽  
Layer Deposition

scholarly journals Mechanism for Al2O3 Atomic Layer Deposition on LiMn2O4 from In Situ Measurements and Ab Initio Calculations

Chem ◽  
2018 ◽  
Vol 4 (10) ◽  
pp. 2418-2435 ◽  
Author(s):  
Lin Chen ◽  
Robert E. Warburton ◽  
Kan-Sheng Chen ◽  
Joseph A. Libera ◽  
Christopher Johnson ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Ab Initio Calculations ◽  
Ab Initio ◽  
Atomic Layer ◽  
In Situ Measurements ◽  
Layer Deposition

Application of Atomic Layer Deposition in Dye-Sensitized Photoelectrosynthesis Cells

2021 ◽  
Vol 3 (1) ◽  
pp. 59-71
Author(s):  
Degao Wang ◽  
Qing Huang ◽  
Weiqun Shi ◽  
Wei You ◽  
Thomas J. Meyer
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Dye Sensitized ◽  
Layer Deposition
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