TiCp*(OMe)3 versus Ti(OMe)4 in Atomic Layer Deposition of TiO2 with Water—Ab Initio Modelling of Atomic Layer Deposition Surface Reactions

Aleksandra Zydor; Simon D. Elliott

doi:10.1166/jnn.2011.5108

TiCp*(OMe)3 versus Ti(OMe)4 in Atomic Layer Deposition of TiO2 with Water—Ab Initio Modelling of Atomic Layer Deposition Surface Reactions

Journal of Nanoscience and Nanotechnology ◽

10.1166/jnn.2011.5108 ◽

2011 ◽

Vol 11 (9) ◽

pp. 8089-8093 ◽

Cited By ~ 13

Author(s):

Aleksandra Zydor ◽

Simon D. Elliott

Keyword(s):

Atomic Layer Deposition ◽

Ab Initio ◽

Surface Reactions ◽

Atomic Layer ◽

Deposition Surface ◽

Layer Deposition

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Correction to “Atomic Layer Deposition of Aluminum Phosphate Using AlMe3, PO(OMe)3, and O2 Plasma: Film Growth and Surface Reactions”

The Journal of Physical Chemistry C ◽

10.1021/acs.jpcc.0c10011 ◽

2020 ◽

Vol 124 (49) ◽

pp. 27250-27250

Author(s):

N. Hornsveld ◽

W. M. M. Kessels ◽

M. Creatore

Keyword(s):

Atomic Layer Deposition ◽

Film Growth ◽

Surface Reactions ◽

Atomic Layer ◽

Aluminum Phosphate ◽

Layer Deposition ◽

O2 Plasma

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Analysis of TiO2 Atomic Layer Deposition Surface Chemistry and Evidence of Propene Oligomerization Using Surface-Enhanced Raman Spectroscopy

Journal of the American Chemical Society ◽

10.1021/jacs.8b10689 ◽

2018 ◽

Vol 141 (1) ◽

pp. 414-422 ◽

Cited By ~ 12

Author(s):

Ryan A. Hackler ◽

Gyeongwon Kang ◽

George C. Schatz ◽

Peter C. Stair ◽

Richard P. Van Duyne

Keyword(s):

Raman Spectroscopy ◽

Atomic Layer Deposition ◽

Surface Chemistry ◽

Atomic Layer ◽

Surface Enhanced Raman Spectroscopy ◽

Deposition Surface ◽

Layer Deposition ◽

Surface Enhanced ◽

Surface Enhanced Raman

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Atomic layer deposition surface functionalized biochar for adsorption of organic pollutants: improved hydrophilia and adsorption capacity

International Journal of Environmental Science and Technology ◽

10.1007/s13762-017-1300-8 ◽

2017 ◽

Vol 14 (9) ◽

pp. 1825-1834 ◽

Cited By ~ 6

Author(s):

X. Wang ◽

M. R. Bayan ◽

M. Yu ◽

D. K. Ludlow ◽

X. Liang

Keyword(s):

Atomic Layer Deposition ◽

Adsorption Capacity ◽

Organic Pollutants ◽

Atomic Layer ◽

Deposition Surface ◽

Layer Deposition

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First-principles study of the surface reactions of aminosilane precursors over WO3(001) during atomic layer deposition of SiO2

RSC Advances ◽

10.1039/d0ra01635g ◽

2020 ◽

Vol 10 (28) ◽

pp. 16584-16592

Author(s):

Kyungtae Lee ◽

Youngseon Shim

Keyword(s):

Atomic Layer Deposition ◽

First Principles ◽

Surface Reactions ◽

Atomic Layer ◽

Reaction Pathways ◽

Energy Diagram ◽

First Principles Study ◽

Layer Deposition

Energy diagram of reaction pathways for decomposition of different aminosilane precursors on a WO3 (001) surface.

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Initial surface reactions in atomic layer deposition of Al2O3on the hydroxylated GaAs(001)-4 × 2 surface

Journal of Physics Condensed Matter ◽

10.1088/0953-8984/17/48/005 ◽

2005 ◽

Vol 17 (48) ◽

pp. 7517-7522 ◽

Cited By ~ 5

Author(s):

Hong-Liang Lu ◽

Wei Chen ◽

Shi-Jin Ding ◽

Min Xu ◽

David Wei Zhang ◽

...

Keyword(s):

Atomic Layer Deposition ◽

Surface Reactions ◽

Atomic Layer ◽

Initial Surface ◽

Layer Deposition

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Kinetics of the WF6 and Si2H6 surface reactions during tungsten atomic layer deposition

Surface Science ◽

10.1016/s0039-6028(01)00969-4 ◽

2001 ◽

Vol 479 (1-3) ◽

pp. 121-135 ◽

Cited By ~ 47

Author(s):

J.W Elam ◽

C.E Nelson ◽

R.K Grubbs ◽

S.M George

Keyword(s):

Atomic Layer Deposition ◽

Surface Reactions ◽

Atomic Layer ◽

Layer Deposition ◽

Kinetics Of

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Quantum chemical study of the initial surface reactions of atomic layer deposition GaAs for photonic crystal fabrication

Applied Physics Letters ◽

10.1063/1.2901880 ◽

2008 ◽

Vol 92 (11) ◽

pp. 111105 ◽

Cited By ~ 5

Author(s):

Lin Dong ◽

Qing-Qing Sun ◽

Yu Shi ◽

Han Liu ◽

Chen Wang ◽

...

Keyword(s):

Photonic Crystal ◽

Atomic Layer Deposition ◽

Quantum Chemical ◽

Surface Reactions ◽

Quantum Chemical Study ◽

Atomic Layer ◽

Chemical Study ◽

Initial Surface ◽

Layer Deposition

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Surface and sub-surface reactions during low temperature aluminium oxide atomic layer deposition on fiber-forming polymers

Journal of Materials Chemistry ◽

10.1039/c0jm00355g ◽

2010 ◽

Vol 20 (20) ◽

pp. 4213 ◽

Cited By ~ 112

Author(s):

Joseph C. Spagnola ◽

Bo Gong ◽

Sara A. Arvidson ◽

Jesse S. Jur ◽

Saad A. Khan ◽

...

Keyword(s):

Low Temperature ◽

Atomic Layer Deposition ◽

Surface Reactions ◽

Aluminium Oxide ◽

Atomic Layer ◽

Layer Deposition

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Surface reactions of TiCl4 and Al(CH3)3 on GaAs(100) during the first half-cycle of atomic layer deposition

Surface Science ◽

10.1016/j.susc.2011.04.009 ◽

2011 ◽

Vol 605 (13-14) ◽

pp. 1243-1248 ◽

Cited By ~ 14

Author(s):

Bernal Granados-Alpizar ◽

Anthony J. Muscat

Keyword(s):

Atomic Layer Deposition ◽

Surface Reactions ◽

Atomic Layer ◽

Half Cycle ◽

Layer Deposition

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In situ diagnostics for studying gas-surface reactions during thermal and plasma-assisted atomic layer deposition

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.3670404 ◽

2012 ◽

Vol 30 (1) ◽

pp. 01A158 ◽

Cited By ~ 23

Author(s):

Vikrant R. Rai ◽

Sumit Agarwal

Keyword(s):

Atomic Layer Deposition ◽

Surface Reactions ◽

Atomic Layer ◽

Layer Deposition ◽

In Situ Diagnostics

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