Focused ion beam time-of-flight secondary ion mass spectroscopy tomography of through-silicon vias for 3D integration

2016 ◽  
Vol 34 (3) ◽  
pp. 03H137 ◽  
Author(s):  
Jean-Paul Barnes ◽  
Larissa Djomeni ◽  
Stéphane Minoret ◽  
Thierry Mourier ◽  
Jean-Marc Fabbri ◽  
...  
Keyword(s):  
Mass Spectroscopy ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Time Of Flight ◽  
3D Integration ◽  
Through Silicon Vias ◽  
Secondary Ion Mass Spectroscopy ◽  
Silicon Vias ◽  
Secondary Ion

Time-of-flight secondary ion mass spectroscopy for surface analysis of insulators using a cluster ion beam

2003 ◽  
Vol 83 (23) ◽  
pp. 4872-4874 ◽  
Author(s):  
K. Hirata ◽  
Y. Saitoh ◽  
A. Chiba ◽  
K. Narumi ◽  
Y. Kobayashi ◽  
...  
Keyword(s):  
Surface Analysis ◽  
Mass Spectroscopy ◽  
Ion Beam ◽  
Time Of Flight ◽  
Secondary Ion Mass Spectroscopy ◽  
Cluster Ion ◽  
Secondary Ion

An investigation of the wear track on DLC (a-C:H) film by time-of-flight secondary ion mass spectroscopy

2001 ◽  
Vol 146-147 ◽  
pp. 378-383 ◽  
Author(s):  
Haruyo Fukui ◽  
Miki Irie ◽  
Yoshiharu Utsumi ◽  
Kazuhiko Oda ◽  
Hisanori Ohara
Keyword(s):  
Mass Spectroscopy ◽  
Wear Track ◽  
Time Of Flight ◽  
Secondary Ion Mass Spectroscopy ◽  
Secondary Ion
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