Ion-induced effects on grain boundaries and a-Si:H tissue quality in microcrystalline silicon films

2012 ◽  
Vol 30 (6) ◽  
pp. 061512 ◽  
Author(s):  
A. C. Bronneberg ◽  
N. Cankoy ◽  
M. C. M. van de Sanden ◽  
M. Creatore
Keyword(s):  
Grain Boundaries ◽  
Silicon Films ◽  
Microcrystalline Silicon ◽  
Tissue Quality

Origin of the Low-Energy Photoluminescence in Microcrystalline Silicon Films

2003 ◽  
Vol 762 ◽  
Author(s):  
Joon-Yong Lee ◽  
Dong-Hyun Park ◽  
Jong-Hwan Yoon
Keyword(s):  
Grain Boundaries ◽  
Amorphous Phase ◽  
Radiative Recombination ◽  
Growth Conditions ◽  
Low Energy ◽  
Silicon Films ◽  
Microcrystalline Silicon ◽  
Band Tail ◽  
Deposition Conditions

AbstractIn this work we have investigated the low-energy photoluminescence (PL) band with a peak between 0.8 eV and 1.0 eV for microcrystalline silicon films (μc-Si:H) grown under various growth conditions. At least four subbands are observed, the peaks of which are located near 0.80 eV, 0.87 eV, 0.92 eV, and 0.97 eV, respectively. It is suggested that the low-energy PL band basically arises from a superposition of these subbands, whose intensities strongly depend on deposition conditions, and thus its peak is determined by the sum of these subband intensities. From the results, it is suggested that the subband centered at 0.92 eV originates from defect-related radiative recombination in the amorphous phase rather than radiative band tail-to-tail transitions in the grain boundaries.

Microcrystalline Silicon Films Deposited by Cathode‐Type RF Glow Discharge Technique

1995 ◽  
Vol 142 (5) ◽  
pp. 1663-1666 ◽  
Author(s):  
Ahalapitiya Hewage Jayatissa ◽  
Yoichiro Nakanishi ◽  
Yosinori Hatanaka
Keyword(s):  
Glow Discharge ◽  
Silicon Films ◽  
Microcrystalline Silicon ◽  
Rf Glow Discharge

Preparation and properties of microcrystalline silicon films using photochemical vapor deposition

1983 ◽  
Vol 59-60 ◽  
pp. 715-718 ◽  
Author(s):  
Tadashi Saitoh ◽  
Toshikazu Shimada ◽  
Masataka Migitaka ◽  
Yasuo Tarui
Keyword(s):  
Vapor Deposition ◽  
Silicon Films ◽  
Microcrystalline Silicon ◽  
Photochemical Vapor Deposition

STM on doped and undoped hydrogenated amorphous and microcrystalline silicon films

1992 ◽  
Vol 42-44 ◽  
pp. 1398-1402 ◽  
Author(s):  
W. Zimmermann-Edling ◽  
R. Wiesendanger ◽  
F. Finger ◽  
K. Prasad ◽  
A. Shah
Keyword(s):  
Silicon Films ◽  
Microcrystalline Silicon ◽  
Hydrogenated Amorphous

Study of metastabilities in microcrystalline silicon films by photoconductivity techniques

2006 ◽  
Vol 501 (1-2) ◽  
pp. 129-132 ◽  
Author(s):  
N. Souffi ◽  
G.H. Bauer ◽  
R. Brüggemann
Keyword(s):  
Silicon Films ◽  
Microcrystalline Silicon
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