Control of the gas phase and the surface reactions during the high rate synthesis of high quality microcrystalline silicon films: Effects of the source gas supply method and the substrate bias

2007 ◽  
Vol 101 (11) ◽  
pp. 114912 ◽  
Author(s):  
Haijun Jia ◽  
Hajime Shirai ◽  
Michio Kondo
Keyword(s):  
Gas Phase ◽  
Surface Reactions ◽  
Silicon Films ◽  
High Rate ◽  
Substrate Bias ◽  
Microcrystalline Silicon ◽  
High Quality ◽  
Gas Supply

High rate growth of device-grade microcrystalline silicon films at 8nm/s

2006 ◽  
Vol 90 (18-19) ◽  
pp. 3223-3231 ◽  
Author(s):  
Chisato Niikura ◽  
Michio Kondo ◽  
Akihisa Matsuda
Keyword(s):  
Silicon Films ◽  
High Rate ◽  
Microcrystalline Silicon

High rate growth highly crystallized microcrystalline silicon films using SiH4/H2 high-density microwave plasma

2007 ◽  
Vol 515 (9) ◽  
pp. 4098-4104 ◽  
Author(s):  
Jhantu K. Saha ◽  
Haijun Jia ◽  
Naoyuki Ohse ◽  
Hajime Shirai
Keyword(s):  
Microwave Plasma ◽  
High Density ◽  
Silicon Films ◽  
High Rate ◽  
Microcrystalline Silicon

High-rate growth of microcrystalline silicon films using a high-density SiH4/H2 glow-discharge plasma

2004 ◽  
Vol 457 (1) ◽  
pp. 84-89 ◽  
Author(s):  
Chisato Niikura ◽  
Naho Itagaki ◽  
Michio Kondo ◽  
Yoshinobu Kawai ◽  
Akihisa Matsuda
Keyword(s):  
Glow Discharge ◽  
Discharge Plasma ◽  
High Density ◽  
Silicon Films ◽  
High Rate ◽  
Glow Discharge Plasma ◽  
Microcrystalline Silicon

scholarly journals Impact of secondary gas-phase reactions on microcrystalline silicon solar cells deposited at high rate

2010 ◽  
Vol 96 (23) ◽  
pp. 233508 ◽  
Author(s):  
G. Parascandolo ◽  
R. Bartlome ◽  
G. Bugnon ◽  
T. Söderström ◽  
B. Strahm ◽  
...  
Keyword(s):  
Solar Cells ◽  
Gas Phase ◽  
High Rate ◽  
Silicon Solar Cells ◽  
Microcrystalline Silicon ◽  
Gas Phase Reactions
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