Electron beam lithography writing strategies for low loss, high confinement silicon optical waveguides

2011 ◽  
Vol 29 (6) ◽  
pp. 06F309 ◽  
Author(s):  
Richard J. Bojko ◽  
Jing Li ◽  
Li He ◽  
Tom Baehr-Jones ◽  
Michael Hochberg ◽  
...  
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Electron Beam ◽  
Electron Beam Lithography ◽  
Optical Waveguides ◽  
Writing Strategies ◽  
Low Loss

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Vol 78 (15) ◽  
pp. 2110-2112 ◽  
Author(s):  
W. H. Wong ◽  
J. Zhou ◽  
E. Y. B. Pun
Keyword(s):  
Electron Beam ◽  
Optical Waveguides ◽  
Direct Writing ◽  
Low Loss

Fabrication of a Low-Loss SSC Using High-Dose Electron Beam Lithography Exposure With Negative PMMA Resist

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Vol 22 (7) ◽  
pp. 501-503 ◽  
Author(s):  
Yan Liu ◽  
Xuejun Xu ◽  
Bo Xing ◽  
Yude Yu ◽  
Jinzhong Yu
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Electron Beam ◽  
Electron Beam Lithography ◽  
High Dose ◽  
Low Loss

Electron beam lithography on LiF films for integrated active optical waveguides

1998 ◽  
Author(s):  
Giuseppe Baldacchini ◽  
E. Burattini ◽  
Antonio Grilli ◽  
A. Raco ◽  
Antonella Mancini ◽  
...  
Keyword(s):  
Electron Beam ◽  
Electron Beam Lithography ◽  
Optical Waveguides

Polyimide optical waveguides fabricated with electron beam lithography

1990 ◽  
Vol 29 (27) ◽  
pp. 3880 ◽  
Author(s):  
M. J. Rooks ◽  
H. V. Roussell ◽  
L. M. Johnson
Keyword(s):  
Electron Beam ◽  
Electron Beam Lithography ◽  
Optical Waveguides

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2014 ◽  
Vol 53 (6S) ◽  
pp. 06JB04 ◽  
Author(s):  
Yuki Atsumi ◽  
Nit Taksatorn ◽  
Nobuhiko Nishiyama ◽  
Yasuyuki Miyamoto ◽  
Shigehisa Arai
Keyword(s):  
Electron Beam ◽  
Electron Beam Lithography ◽  
Optical Waveguides ◽  
Loss Reduction ◽  
Step Size
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