Modification of transparent conductive ZnO and Ga-doped ZnO films by irradiation with electron cyclotron resonance argon plasma

Housei Akazawa

doi:10.1116/1.3571603

Modification of transparent conductive ZnO and Ga-doped ZnO films by irradiation with electron cyclotron resonance argon plasma

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.3571603 ◽

2011 ◽

Vol 29 (3) ◽

pp. 031304 ◽

Cited By ~ 10

Author(s):

Housei Akazawa

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Argon Plasma ◽

Electron Cyclotron ◽

Zno Films ◽

Doped Zno

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Combinatorial characterization of transparent conductive properties of Ga-doped ZnO films cosputtered from electron cyclotron resonance and rf magnetron plasma sources

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.3328053 ◽

2010 ◽

Vol 28 (2) ◽

pp. 314-321 ◽

Cited By ~ 23

Author(s):

Housei Akazawa

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Zno Films ◽

Combinatorial Characterization ◽

Plasma Sources ◽

Doped Zno ◽

Conductive Properties

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Mechanical and transparent conductive properties of ZnO and Ga-doped ZnO films sputtered using electron-cyclotron-resonance plasma on polyethylene naphtalate substrates

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.4831979 ◽

2014 ◽

Vol 32 (2) ◽

pp. 021503 ◽

Cited By ~ 3

Author(s):

Housei Akazawa

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Zno Films ◽

Electron Cyclotron Resonance Plasma ◽

Doped Zno ◽

Conductive Properties ◽

Resonance Plasma

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Single-Crystalline ZnO Films Grown on (0001)Al2O3 Substrate by Electron Cyclotron Resonance-Assisted Molecular Beam Epitaxy Technique

Japanese Journal of Applied Physics ◽

10.1143/jjap.36.l933 ◽

1997 ◽

Vol 36 (Part 2, No. 7B) ◽

pp. L933-L935 ◽

Cited By ~ 24

Author(s):

Hee-Bog Kang ◽

Kiyoshi Nakamura ◽

Kenji Yoshida ◽

Kazuo Ishikawa

Keyword(s):

Molecular Beam Epitaxy ◽

Cyclotron Resonance ◽

Molecular Beam ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Zno Films ◽

Al2o3 Substrate ◽

Single Crystalline

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Crystal structures and optical properties of ZnO films prepared by sputtering‐type electron cyclotron resonance microwave plasma

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.576302 ◽

1989 ◽

Vol 7 (5) ◽

pp. 2975-2982 ◽

Cited By ~ 26

Author(s):

Morito Matsuoka ◽

Ken’ichi Ono

Keyword(s):

Optical Properties ◽

Crystal Structures ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Microwave Plasma ◽

Electron Cyclotron ◽

Zno Films ◽

Resonance Microwave

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Study of defects and interfaces in epitaxial ZnO films on (112̄0) Al2O3 grown by electron cyclotron resonance-assisted molecular beam epitaxy

Journal of Crystal Growth ◽

10.1016/s0022-0248(01)00875-2 ◽

2001 ◽

Vol 225 (2-4) ◽

pp. 202-207 ◽

Cited By ~ 22

Author(s):

S.-H. Lim ◽

D. Shindo ◽

H.-B. Kang ◽

K. Nakamura

Keyword(s):

Molecular Beam Epitaxy ◽

Cyclotron Resonance ◽

Molecular Beam ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Zno Films

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Characteristics of piezoelectric ZnO films deposited by RF mode electron cyclotron resonance sputtering system

Electronics Letters ◽

10.1049/el:19921490 ◽

1992 ◽

Vol 28 (25) ◽

pp. 2315-2317 ◽

Cited By ~ 6

Author(s):

M. Kadota ◽

T. Kasanami ◽

M. Minakata

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Zno Films ◽

Sputtering System

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COMSOL simulation of a 2.45 GHz electron cyclotron resonance argon plasma

10.1063/1.5053298 ◽

2018 ◽

Cited By ~ 1

Author(s):

Mostafa Salahshoor ◽

Morteza Aslaninejad

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Argon Plasma ◽

Electron Cyclotron ◽

Comsol Simulation

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Measurement of metastable state densities and electron temperatures in an electron cyclotron resonance argon plasma

Acta Physica Sinica ◽

10.7498/aps.54.2153 ◽

2005 ◽

Vol 54 (5) ◽

pp. 2153

Author(s):

Chen Zhuo ◽

He Wei ◽

Pu Yi-Kang

Keyword(s):

Metastable State ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Argon Plasma ◽

Electron Cyclotron ◽

State Densities

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Properties of high quality ZnO films deposited by an RF magnetron mode electron cyclotron resonance (ECR) sputtering system

1996 IEEE Ultrasonics Symposium. Proceedings ◽

10.1109/ultsym.1996.583979 ◽

2002 ◽

Cited By ~ 4

Author(s):

M. Kadota ◽

M. Minakata

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Zno Films ◽

High Quality ◽

Sputtering System

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Preparation of Transparent and Conductive SnO2 Doped ZnO Thin Films by Electron Cyclotron Resonance Sputtering Method.

Shinku ◽

10.3131/jvsj.41.274 ◽

1998 ◽

Vol 41 (3) ◽

pp. 274-277

Author(s):

Rieko YAGUCHI ◽

Shizuka SAKUMA ◽

Eiji KAMIJO

Keyword(s):

Thin Films ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Zno Thin Films ◽

Doped Zno

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