Characteristics of piezoelectric ZnO films deposited by RF mode electron cyclotron resonance sputtering system

M. Kadota; T. Kasanami; M. Minakata

doi:10.1049/el:19921490

Characteristics of piezoelectric ZnO films deposited by RF mode electron cyclotron resonance sputtering system

Electronics Letters ◽

10.1049/el:19921490 ◽

1992 ◽

Vol 28 (25) ◽

pp. 2315-2317 ◽

Cited By ~ 6

Author(s):

M. Kadota ◽

T. Kasanami ◽

M. Minakata

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Zno Films ◽

Sputtering System

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Properties of high quality ZnO films deposited by an RF magnetron mode electron cyclotron resonance (ECR) sputtering system

1996 IEEE Ultrasonics Symposium. Proceedings ◽

10.1109/ultsym.1996.583979 ◽

2002 ◽

Cited By ~ 4

Author(s):

M. Kadota ◽

M. Minakata

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Zno Films ◽

High Quality ◽

Sputtering System

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Piezoelectric and optical properties of ZnO films deposited by an electron–cyclotron-resonance sputtering system

Journal of Crystal Growth ◽

10.1016/s0022-0248(01)01958-3 ◽

2002 ◽

Vol 237-239 ◽

pp. 523-527 ◽

Cited By ~ 13

Author(s):

Michio Kadota ◽

Toshinori Miura ◽

Makoto Minakata

Keyword(s):

Optical Properties ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Zno Films ◽

Sputtering System

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Piezoelectric Characteristics of ZnO Films Deposited Using an Electron Cyclotron Resonance Sputtering System

Japanese Journal of Applied Physics ◽

10.1143/jjap.31.3013 ◽

1992 ◽

Vol 31 (Part 1, No. 9B) ◽

pp. 3013-3016 ◽

Cited By ~ 21

Author(s):

Michio Kadota ◽

Toru Kasanami ◽

Makoto Minakata

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Zno Films ◽

Piezoelectric Characteristics ◽

Sputtering System

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Single-Crystalline ZnO Films Grown on (0001)Al2O3 Substrate by Electron Cyclotron Resonance-Assisted Molecular Beam Epitaxy Technique

Japanese Journal of Applied Physics ◽

10.1143/jjap.36.l933 ◽

1997 ◽

Vol 36 (Part 2, No. 7B) ◽

pp. L933-L935 ◽

Cited By ~ 24

Author(s):

Hee-Bog Kang ◽

Kiyoshi Nakamura ◽

Kenji Yoshida ◽

Kazuo Ishikawa

Keyword(s):

Molecular Beam Epitaxy ◽

Cyclotron Resonance ◽

Molecular Beam ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Zno Films ◽

Al2o3 Substrate ◽

Single Crystalline

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Crystal structures and optical properties of ZnO films prepared by sputtering‐type electron cyclotron resonance microwave plasma

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.576302 ◽

1989 ◽

Vol 7 (5) ◽

pp. 2975-2982 ◽

Cited By ~ 26

Author(s):

Morito Matsuoka ◽

Ken’ichi Ono

Keyword(s):

Optical Properties ◽

Crystal Structures ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Microwave Plasma ◽

Electron Cyclotron ◽

Zno Films ◽

Resonance Microwave

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Study of defects and interfaces in epitaxial ZnO films on (112̄0) Al2O3 grown by electron cyclotron resonance-assisted molecular beam epitaxy

Journal of Crystal Growth ◽

10.1016/s0022-0248(01)00875-2 ◽

2001 ◽

Vol 225 (2-4) ◽

pp. 202-207 ◽

Cited By ~ 22

Author(s):

S.-H. Lim ◽

D. Shindo ◽

H.-B. Kang ◽

K. Nakamura

Keyword(s):

Molecular Beam Epitaxy ◽

Cyclotron Resonance ◽

Molecular Beam ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Zno Films

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Combinatorial characterization of transparent conductive properties of Ga-doped ZnO films cosputtered from electron cyclotron resonance and rf magnetron plasma sources

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.3328053 ◽

2010 ◽

Vol 28 (2) ◽

pp. 314-321 ◽

Cited By ~ 23

Author(s):

Housei Akazawa

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Zno Films ◽

Combinatorial Characterization ◽

Plasma Sources ◽

Doped Zno ◽

Conductive Properties

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Piezoelectric properties of zinc oxide films on glass substrates deposited by RF-magnetron-mode electron cyclotron resonance sputtering system

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control ◽

10.1109/58.384442 ◽

1995 ◽

Vol 42 (3) ◽

pp. 345-350 ◽

Cited By ~ 27

Author(s):

M. Kadota ◽

M. Minakata

Keyword(s):

Zinc Oxide ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Piezoelectric Properties ◽

Oxide Films ◽

Electron Cyclotron ◽

Glass Substrates ◽

Zinc Oxide Films ◽

Sputtering System

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Characteristics of Zinc Oxide Films on Glass Substrates Deposited by RF-Mode Electron Cyclotron Resonance Sputtering System

Japanese Journal of Applied Physics ◽

10.1143/jjap.32.2341 ◽

1993 ◽

Vol 32 (Part 1, No. 5B) ◽

pp. 2341-2345 ◽

Cited By ~ 28

Author(s):

Michio Kadota ◽

Toru Kasanami ◽

Makoto Minakata

Keyword(s):

Zinc Oxide ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Oxide Films ◽

Electron Cyclotron ◽

Glass Substrates ◽

Zinc Oxide Films ◽

Sputtering System

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Modification of transparent conductive ZnO and Ga-doped ZnO films by irradiation with electron cyclotron resonance argon plasma

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.3571603 ◽

2011 ◽

Vol 29 (3) ◽

pp. 031304 ◽

Cited By ~ 10

Author(s):

Housei Akazawa

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Argon Plasma ◽

Electron Cyclotron ◽

Zno Films ◽

Doped Zno

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