Preparation of Transparent and Conductive SnO2 Doped ZnO Thin Films by Electron Cyclotron Resonance Sputtering Method.

Rieko YAGUCHI; Shizuka SAKUMA; Eiji KAMIJO

doi:10.3131/jvsj.41.274

Preparation of Transparent and Conductive SnO2 Doped ZnO Thin Films by Electron Cyclotron Resonance Sputtering Method.

Shinku ◽

10.3131/jvsj.41.274 ◽

1998 ◽

Vol 41 (3) ◽

pp. 274-277

Author(s):

Rieko YAGUCHI ◽

Shizuka SAKUMA ◽

Eiji KAMIJO

Keyword(s):

Thin Films ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Zno Thin Films ◽

Doped Zno

Download Full-text

Growth of ZnO Thin Films on LiNbO3Substrates by Electron Cyclotron Resonance-Assisted Molecular Beam Epitaxy

Japanese Journal of Applied Physics ◽

10.1143/jjap.37.5220 ◽

1998 ◽

Vol 37 (Part 1, No. 9B) ◽

pp. 5220-5223 ◽

Cited By ~ 12

Author(s):

Hee-Bog Kang ◽

Kenji Yoshida ◽

Kiyoshi Nakamura

Keyword(s):

Thin Films ◽

Molecular Beam Epitaxy ◽

Cyclotron Resonance ◽

Molecular Beam ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Zno Thin Films

Download Full-text

Study of the effect of plasma power on ZnO thin films growth using electron cyclotron resonance plasma-assisted molecular-beam epitaxy

Applied Surface Science ◽

10.1016/j.apsusc.2008.09.068 ◽

2008 ◽

Vol 255 (5) ◽

pp. 3375-3380 ◽

Cited By ~ 16

Author(s):

Z. Yang ◽

J.-H. Lim ◽

S. Chu ◽

Z. Zuo ◽

J.L. Liu

Keyword(s):

Thin Films ◽

Molecular Beam Epitaxy ◽

Cyclotron Resonance ◽

Molecular Beam ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Zno Thin Films ◽

Plasma Power ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

Download Full-text

p-Type conduction in transparent semiconductor ZnO thin films induced by electron cyclotron resonance N2O plasma

Optical Materials ◽

10.1016/s0925-3467(01)00224-5 ◽

2002 ◽

Vol 19 (1) ◽

pp. 229-233 ◽

Cited By ~ 37

Author(s):

Xin-Li Guo ◽

Hitoshi Tabata ◽

Tomoji Kawai

Keyword(s):

Thin Films ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Zno Thin Films ◽

Transparent Semiconductor ◽

P Type ◽

Type Conduction

Download Full-text

Highly conductive, undoped ZnO thin films deposited by electron-cyclotron-resonance plasma sputtering on silica glass substrate

Thin Solid Films ◽

10.1016/j.tsf.2009.06.008 ◽

2009 ◽

Vol 518 (1) ◽

pp. 22-26 ◽

Cited By ~ 23

Author(s):

Housei Akazawa

Keyword(s):

Thin Films ◽

Glass Substrate ◽

Silica Glass ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Zno Thin Films ◽

Electron Cyclotron Resonance Plasma ◽

Plasma Sputtering ◽

Resonance Plasma

Download Full-text

Dielectric Permittivity of Amorphous and Hexagonal Electron Cyclotron Resonance Plasma Deposited Ta[sub 2]O[sub 5] Thin Films

Electrochemical and Solid-State Letters ◽

10.1149/1.1390814 ◽

1999 ◽

Vol 2 (6) ◽

pp. 291 ◽

Cited By ~ 11

Author(s):

C. Chaneliere

Keyword(s):

Thin Films ◽

Dielectric Permittivity ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

Download Full-text

Electron Cyclotron Resonance Plasma Sources and Their Use in Plasma-Assisted Chemical Vapor Deposition of Thin Films

Physics of Thin Films - Plasma Sources for Thin Film Deposition and Etching ◽

10.1016/b978-0-08-092513-4.50007-6 ◽

1994 ◽

pp. 121-233 ◽

Cited By ~ 8

Author(s):

OLEG A. POPOV

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Plasma Sources ◽

Resonance Plasma

Download Full-text

Investigations on electrical properties of a-C:H thin films deposited in a Microwave Multipolar Plasma reactor excited at Distributed Electron Cyclotron Resonance

Diamond and Related Materials ◽

10.1016/j.diamond.2008.01.036 ◽

2008 ◽

Vol 17 (7-10) ◽

pp. 1710-1715 ◽

Cited By ~ 6

Author(s):

M. Kihel ◽

R. Clergereaux ◽

D. Escaich ◽

M. Calafat ◽

P. Raynaud ◽

...

Keyword(s):

Thin Films ◽

Electrical Properties ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Plasma Reactor ◽

Electron Cyclotron

Download Full-text

Plasma diagnostics of resonance magnetic field effects on a-Si:H thin films deposition using electron cyclotron resonance plasma

2015 China Semiconductor Technology International Conference ◽

10.1109/cstic.2015.7153464 ◽

2015 ◽

Author(s):

L.C. Hu ◽

Y.W. Lin ◽

C.J. Wang ◽

T. C. Wei ◽

C.R. Yang ◽

...

Keyword(s):

Magnetic Field ◽

Thin Films ◽

Plasma Diagnostics ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Magnetic Field Effects ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma ◽

Resonance Magnetic Field

Download Full-text

Optical Properties of c-Axis Oriented Ba2NaNb5O15 Thin Films Formed by Electron Cyclotron Resonance Plasma Sputtering

Journal of the Ceramic Society of Japan ◽

10.2109/jcersj.105.687 ◽

1997 ◽

Vol 105 (1224) ◽

pp. 687-689

Author(s):

Akira WATAZU ◽

Hiroshi MASUMOTO ◽

Yoichiro MASUDA ◽

Toshio HIRAI

Keyword(s):

Thin Films ◽

Optical Properties ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Plasma Sputtering ◽

Resonance Plasma

Download Full-text

Ultrathin HfOxNy Gate Insulator Formation by Electron Cyclotron Resonance Ar/N2 Plasma Nitridation of HfO2 Thin Films

IEICE Transactions on Electronics ◽

10.1093/ietele/e89-c.5.596 ◽

2006 ◽

Vol E89-C (5) ◽

pp. 596-601 ◽

Cited By ~ 7

Author(s):

S.-i. OHMI

Keyword(s):

Thin Films ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Gate Insulator ◽

Plasma Nitridation ◽

N2 Plasma

Download Full-text