Influence of hydrogen silsesquioxane resist exposure temperature on ultrahigh resolution electron beam lithography

2008 ◽  
Vol 26 (6) ◽  
pp. 2049-2053 ◽  
Author(s):  
Vadim Sidorkin ◽  
Emile van der Drift ◽  
Huub Salemink
Keyword(s):  
Electron Beam ◽  
Electron Beam Lithography ◽  
Hydrogen Silsesquioxane ◽  
Ultrahigh Resolution ◽  
Exposure Temperature ◽  
Resolution Electron

Effect of Salty Development on Forming HSQ Resist Nanodot Arrays with a Pitch of 15×15 nm2 by 30-keV Electron Beam Lithography

2013 ◽  
Vol 534 ◽  
pp. 113-117
Author(s):  
Takuya Komori ◽  
Hui Zhang ◽  
Takashi Akahane ◽  
Zulfakri bin Mohamad ◽  
You Yin ◽  
...  
Keyword(s):  
Electron Beam ◽  
Electron Beam Lithography ◽  
Ammonium Hydroxide ◽  
Hydrogen Silsesquioxane ◽  
Ultrahigh Resolution ◽  
Patterned Media ◽  
Tetramethyl Ammonium ◽  
Tetramethyl Ammonium Hydroxide ◽  
Nanodot Arrays

We investigated the effect of ultrahigh-resolution salty (NaCl contained) development of hydrogen silsesquioxane (HSQ) resist on forming fine dot arrays with a pitch of 15×15 nm2 by 30-keV electron beam lithography for patterned media. The optimized concentration of resist developers was determined to fabricate most packed pattern. We found that increasing the concentration of NaCl into tetramethyl ammonium hydroxide (TMAH) could greatly improve the resist contrast (γ-value) of HSQ. And by using 2.3 wt% TMAH/4 wt% NaCl developer, we demonstrated 15×15 nm2 pitched (3 Tbit/in.2) HSQ resist dot arrays with a dot size of < 10 nm.

Ultrahigh resolution of calixarene negative resist in electron beam lithography

1996 ◽  
Vol 68 (9) ◽  
pp. 1297-1299 ◽  
Author(s):  
J. Fujita ◽  
Y. Ohnishi ◽  
Y. Ochiai ◽  
S. Matsui
Keyword(s):  
Electron Beam ◽  
Electron Beam Lithography ◽  
Ultrahigh Resolution

High resolution electron beam lithography on CaF2

1984 ◽  
Vol 44 (4) ◽  
pp. 468-469 ◽  
Author(s):  
P. M. Mankiewich ◽  
H. G. Craighead ◽  
T. R. Harrison ◽  
A. H. Dayem
Keyword(s):  
Electron Beam ◽  
High Resolution ◽  
Electron Beam Lithography ◽  
Resolution Electron
Sign in / Sign up

Export Citation Format

Share Document