Self-assembled monolayers of poly(ethylene glycol) siloxane as a resist for ultrahigh-resolution electron beam lithography on silicon oxide

Bo Gao; Gary H. Bernstein; Marya Lieberman

doi:10.1116/1.3212899

Self-assembled monolayers of poly(ethylene glycol) siloxane as a resist for ultrahigh-resolution electron beam lithography on silicon oxide

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ◽

10.1116/1.3212899 ◽

2009 ◽

Vol 27 (5) ◽

pp. 2292 ◽

Cited By ~ 6

Author(s):

Bo Gao ◽

Gary H. Bernstein ◽

Marya Lieberman

Keyword(s):

Electron Beam ◽

Ethylene Glycol ◽

Electron Beam Lithography ◽

Silicon Oxide ◽

Self Assembled Monolayers ◽

Poly Ethylene Glycol ◽

Ultrahigh Resolution ◽

Resolution Electron ◽

Assembled Monolayers ◽

Poly Ethylene

Download Full-text

Directed Immobilization of Protein-Coated Nanospheres to Nanometer-Scale Patterns Fabricated by Electron Beam Lithography of Poly(ethylene glycol) Self-Assembled Monolayers

Langmuir ◽

10.1021/la052306v ◽

2006 ◽

Vol 22 (11) ◽

pp. 5100-5107 ◽

Cited By ~ 52

Author(s):

Jonas Rundqvist ◽

Jan H. Hoh ◽

David B. Haviland

Keyword(s):

Electron Beam ◽

Ethylene Glycol ◽

Electron Beam Lithography ◽

Self Assembled Monolayers ◽

Nanometer Scale ◽

Poly Ethylene Glycol ◽

Assembled Monolayers ◽

Self Assembled ◽

Poly Ethylene

Download Full-text

Elastic Bounded Diffusion. Dynamics of Ferrocene-Labeled Poly(ethylene glycol) Chains Terminally Attached to the Outermost Monolayer of Successively Self-Assembled Monolayers of Immunoglobulins

Journal of the American Chemical Society ◽

10.1021/ja991780i ◽

1999 ◽

Vol 121 (44) ◽

pp. 10379-10388 ◽

Cited By ~ 27

Author(s):

Agnès Anne ◽

Christophe Demaille ◽

Jacques Moiroux

Keyword(s):

Ethylene Glycol ◽

Self Assembled Monolayers ◽

Poly Ethylene Glycol ◽

Diffusion Dynamics ◽

Assembled Monolayers ◽

Self Assembled ◽

Poly Ethylene

Download Full-text

Electric field induced switching of poly(ethylene glycol) terminated self-assembled monolayers: A parallel molecular dynamics simulation

The Journal of Chemical Physics ◽

10.1063/1.1781120 ◽

2004 ◽

Vol 121 (11) ◽

pp. 5427-5433 ◽

Cited By ~ 19

Author(s):

Satyavani Vemparala ◽

Rajiv K. Kalia ◽

Aiichiro Nakano ◽

Priya Vashishta

Keyword(s):

Molecular Dynamics ◽

Molecular Dynamics Simulation ◽

Electric Field ◽

Ethylene Glycol ◽

Dynamics Simulation ◽

Self Assembled Monolayers ◽

Poly Ethylene Glycol ◽

Assembled Monolayers ◽

Parallel Molecular Dynamics ◽

Poly Ethylene

Download Full-text

Poly(ethylene glycol) and Hydroxy Functionalized Alkane Phosphate Mixed Self-Assembled Monolayers to Control Nonspecific Adsorption of Proteins on Titanium Oxide Surfaces

Langmuir ◽

10.1021/la904066y ◽

2010 ◽

Vol 26 (9) ◽

pp. 6529-6534 ◽

Cited By ~ 28

Author(s):

Sabrina Bozzini ◽

Paola Petrini ◽

Maria Cristina Tanzi ◽

Stefan Zürcher ◽

Samuele Tosatti

Keyword(s):

Ethylene Glycol ◽

Titanium Oxide ◽

Self Assembled Monolayers ◽

Oxide Surfaces ◽

Poly Ethylene Glycol ◽

Nonspecific Adsorption ◽

Assembled Monolayers ◽

Self Assembled ◽

Poly Ethylene

Download Full-text

Electrokinetic Characterization of Oligo- and Poly(ethylene glycol)-Terminated Self-Assembled Monolayers on Gold and Glass Surfaces

Langmuir ◽

10.1021/la0343977 ◽

2003 ◽

Vol 19 (18) ◽

pp. 7380-7385 ◽

Cited By ~ 78

Author(s):

Yee-Hung Mark Chan ◽

Ruediger Schweiss ◽

Carsten Werner ◽

Michael Grunze

Keyword(s):

Ethylene Glycol ◽

Self Assembled Monolayers ◽

Poly Ethylene Glycol ◽

Assembled Monolayers ◽

Self Assembled ◽

Poly Ethylene ◽

Glass Surfaces ◽

Electrokinetic Characterization

Download Full-text

Poly(Ethylene Glycol) and Hydroxy Functionalized Alkane Phosphate Self-Assembled Monolayers Reduce Bacterial Adhesion and Support Osteoblast Proliferation

The International Journal of Artificial Organs ◽

10.5301/ijao.5000047 ◽

2011 ◽

Vol 34 (9) ◽

pp. 898-907 ◽

Cited By ~ 6

Author(s):

Sabrina Bozzini ◽

Paola Petrini ◽

Maria Cristina Tanzi ◽

Carla Renata Arciola ◽

Samuele Tosatti ◽

...

Keyword(s):

Ethylene Glycol ◽

Bacterial Adhesion ◽

Self Assembled Monolayers ◽

Osteoblast Proliferation ◽

Poly Ethylene Glycol ◽

Assembled Monolayers ◽

Self Assembled ◽

Poly Ethylene

Download Full-text

Protein Interactions with Poly(ethylene glycol) Self-Assembled Monolayers on Glass Substrates: Diffusion and Adsorption

Langmuir ◽

10.1021/la990260y ◽

1999 ◽

Vol 15 (24) ◽

pp. 8405-8411 ◽

Cited By ~ 157

Author(s):

Zhihao Yang ◽

Jeffrey A. Galloway ◽

Hyuk Yu

Keyword(s):

Ethylene Glycol ◽

Protein Interactions ◽

Self Assembled Monolayers ◽

Poly Ethylene Glycol ◽

Glass Substrates ◽

Assembled Monolayers ◽

Self Assembled ◽

Poly Ethylene

Download Full-text

The Molecular Recognition Characteristics of ω-Mercapto Methoxy Poly(Ethylene Glycol) Self-Assembled Monolayers at a Gold Electrode and Its Application for Detection of Dopamine in Serum

Analytical Letters ◽

10.1080/00032719808002816 ◽

1998 ◽

Vol 31 (5) ◽

pp. 765-775 ◽

Cited By ~ 4

Author(s):

Shi-Feng Hou ◽

Hui-Qun Fang ◽

Hong-Yuan Chen

Keyword(s):

Molecular Recognition ◽

Ethylene Glycol ◽

Gold Electrode ◽

Self Assembled Monolayers ◽

Poly Ethylene Glycol ◽

Assembled Monolayers ◽

Self Assembled ◽

Poly Ethylene

Download Full-text

Covalent Coupling of Antibodies to Self-Assembled Monolayers of Carboxy-Functionalized Poly(ethylene glycol): Protein Resistance and Specific Binding of Biomolecules†

Langmuir ◽

10.1021/la026327q ◽

2003 ◽

Vol 19 (5) ◽

pp. 1880-1887 ◽

Cited By ~ 96

Author(s):

S. Herrwerth ◽

T. Rosendahl ◽

C. Feng ◽

J. Fick ◽

W. Eck ◽

...

Keyword(s):

Ethylene Glycol ◽

Specific Binding ◽

Self Assembled Monolayers ◽

Poly Ethylene Glycol ◽

Protein Resistance ◽

Covalent Coupling ◽

Assembled Monolayers ◽

Self Assembled ◽

Poly Ethylene

Download Full-text

Substrate effects in poly(ethylene glycol) self-assembled monolayers on granular and flame-annealed gold

Journal of Colloid and Interface Science ◽

10.1016/j.jcis.2006.05.012 ◽

2006 ◽

Vol 301 (1) ◽

pp. 337-341 ◽

Cited By ~ 8

Author(s):

Jonas Rundqvist ◽

Jan H. Hoh ◽

David B. Haviland

Keyword(s):

Ethylene Glycol ◽

Self Assembled Monolayers ◽

Poly Ethylene Glycol ◽

Substrate Effects ◽

Assembled Monolayers ◽

Self Assembled ◽

Poly Ethylene

Download Full-text