Effect of gate hard mask and sidewall spacer structures on the gate oxide reliability of W∕WN[sub x]∕poly-Si gate MOSFET for high density DRAM applications

2005 ◽  
Vol 23 (3) ◽  
pp. 1036 ◽  
Author(s):  
Kwan-Yong Lim ◽  
Heung-Jae Cho ◽  
Se-Aug Jang ◽  
Yong Soo Kim ◽  
Jae-Geun Oh ◽  
...  
Keyword(s):  
Gate Oxide ◽  
High Density ◽  
Hard Mask ◽  
Oxide Reliability

Exploration of heavy ion irradiation effects on gate oxide reliability in power MOSFETs

1995 ◽  
Vol 35 (3) ◽  
pp. 603-608 ◽  
Author(s):  
S.R. Anderson ◽  
R.D. Schrimpf ◽  
K.F. Galloway ◽  
J.L. Titus
Keyword(s):  
Ion Irradiation ◽  
Gate Oxide ◽  
Heavy Ion ◽  
Irradiation Effects ◽  
Power Mosfets ◽  
Heavy Ion Irradiation ◽  
Oxide Reliability

The impact of F contamination induced by the process on the gate oxide reliability

1998 ◽  
Vol 38 (2) ◽  
pp. 255-258 ◽  
Author(s):  
G Ghidini ◽  
C Clementi ◽  
D Drera ◽  
F Maugain
Keyword(s):  
Gate Oxide ◽  
Oxide Reliability ◽  
The Impact

Impacts of Area-Dependent Defects on the Yield and Gate Oxide Reliability of SiC Power MOSFETs

2021 ◽  
Author(s):  
Tianshi Liu ◽  
Shengnan Zhu ◽  
Michael Jin ◽  
Limeng Shi ◽  
Marvin H. White ◽  
...  
Keyword(s):  
Gate Oxide ◽  
Power Mosfets ◽  
Oxide Reliability
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