Langmuir probe measurements in an inductively coupled plasma: Electron energy distribution functions in polymerizing fluorocarbon gases used for selective etching of SiO2

Freddy Gaboriau; Marie-Claude Peignon; Gilles Cartry; Laetitia Rolland; David Eon; Christophe Cardinaud; Guy Turban

doi:10.1116/1.1474419

Langmuir probe measurements in an inductively coupled plasma: Electron energy distribution functions in polymerizing fluorocarbon gases used for selective etching of SiO2

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.1474419 ◽

2002 ◽

Vol 20 (3) ◽

pp. 919-927 ◽

Cited By ~ 18

Author(s):

Freddy Gaboriau ◽

Marie-Claude Peignon ◽

Gilles Cartry ◽

Laetitia Rolland ◽

David Eon ◽

...

Keyword(s):

Energy Distribution ◽

Electron Energy ◽

Langmuir Probe ◽

Inductively Coupled Plasma ◽

Plasma Electron ◽

Distribution Functions ◽

Inductively Coupled ◽

Langmuir Probe Measurements ◽

Energy Distribution Functions ◽

Probe Measurements

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Ion energy distribution functions and Langmuir probe measurements in low pressure argon discharges

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.1451274 ◽

2002 ◽

Vol 20 (2) ◽

pp. 526-529 ◽

Cited By ~ 5

Author(s):

V. Kaeppelin ◽

M. Carrère ◽

J-M. Layet

Keyword(s):

Energy Distribution ◽

Langmuir Probe ◽

Low Pressure ◽

Distribution Functions ◽

Ion Energy ◽

Ion Energy Distribution ◽

Langmuir Probe Measurements ◽

Energy Distribution Functions ◽

Probe Measurements

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The impact of Langmuir probe geometries on electron current collection and the integral relation for obtaining electron energy distribution functions

Plasma Sources Science and Technology ◽

10.1088/0963-0252/21/2/025003 ◽

2012 ◽

Vol 21 (2) ◽

pp. 025003 ◽

Cited By ~ 4

Author(s):

Ahmed El Saghir ◽

Steven Shannon

Keyword(s):

Energy Distribution ◽

Electron Energy ◽

Langmuir Probe ◽

Integral Relation ◽

Distribution Functions ◽

Electron Energy Distribution ◽

Electron Current ◽

Current Collection ◽

Energy Distribution Functions ◽

The Impact

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Theoretical investigation of the evolution of electron energy distribution functions in inductively coupled discharges

Thin Solid Films ◽

10.1016/s0040-6090(03)00375-4 ◽

2003 ◽

Vol 435 (1-2) ◽

pp. 72-77 ◽

Cited By ~ 10

Author(s):

S.S. Kim ◽

Chin Wook Chung ◽

H.Y. Chang

Keyword(s):

Energy Distribution ◽

Electron Energy ◽

Theoretical Investigation ◽

Distribution Functions ◽

Electron Energy Distribution ◽

Inductively Coupled ◽

Energy Distribution Functions

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Langmuir probe measurements of the ion extraction process in inductively coupled plasma mass spectrometry-I. spatially resolved determination of electron density and electron temperature

Spectrochimica Acta Part B Atomic Spectroscopy ◽

10.1016/0584-8547(94)80109-6 ◽

1994 ◽

Vol 49 (12-14) ◽

pp. 1283-1303 ◽

Cited By ~ 28

Author(s):

Hongsen Niu ◽

R.S. Houk

Keyword(s):

Langmuir Probe ◽

Inductively Coupled Plasma ◽

Extraction Process ◽

Inductively Coupled ◽

Ion Extraction ◽

Spatially Resolved ◽

Plasma Mass Spectrometry ◽

Langmuir Probe Measurements ◽

Probe Measurements

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Electron energy distribution functions in low-pressure inductively coupled bounded plasmas

Physics of Plasmas ◽

10.1063/1.2339024 ◽

2006 ◽

Vol 13 (9) ◽

pp. 092104 ◽

Cited By ~ 45

Author(s):

Albert Meige ◽

Rod W. Boswell

Keyword(s):

Energy Distribution ◽

Electron Energy ◽

Low Pressure ◽

Distribution Functions ◽

Electron Energy Distribution ◽

Inductively Coupled ◽

Energy Distribution Functions

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Langmuir probe measurements of the electron energy distribution function in magnetized gas discharge plasmas

Plasma Sources Science and Technology ◽

10.1088/0963-0252/21/2/025004 ◽

2012 ◽

Vol 21 (2) ◽

pp. 025004 ◽

Cited By ~ 34

Author(s):

Tsv K Popov ◽

P Ivanova ◽

M Dimitrova ◽

J Kovačič ◽

T Gyergyek ◽

...

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Langmuir Probe ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Discharge Plasmas ◽

Langmuir Probe Measurements ◽

Probe Measurements

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Langmuir probe measurements in a low pressure inductively coupled plasma used for diamond deposition

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.581691 ◽

1999 ◽

Vol 17 (3) ◽

pp. 721-725 ◽

Cited By ~ 17

Author(s):

Katsuyuki Okada ◽

Shojiro Komatsu ◽

Seiichiro Matsumoto

Keyword(s):

Langmuir Probe ◽

Inductively Coupled Plasma ◽

Low Pressure ◽

Diamond Deposition ◽

Inductively Coupled ◽

Langmuir Probe Measurements ◽

Probe Measurements

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Langmuir probe measurements of electron temperature and electron density behind the skimmer of an inductively coupled plasma mass spectrometer

Spectrochimica Acta Part B Atomic Spectroscopy ◽

10.1016/0584-8547(91)80082-e ◽

1991 ◽

Vol 46 (6-7) ◽

pp. 805-817 ◽

Cited By ~ 24

Author(s):

H.S. Niu ◽

Ke Hu ◽

R.S. Houk

Keyword(s):

Electron Temperature ◽

Electron Density ◽

Mass Spectrometer ◽

Langmuir Probe ◽

Inductively Coupled Plasma ◽

Inductively Coupled ◽

Langmuir Probe Measurements ◽

Probe Measurements

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Langmuir probe measurements of electron temperature in an inductively coupled plasma

Spectrochimica Acta Part B Atomic Spectroscopy ◽

10.1016/0584-8547(88)80053-3 ◽

1988 ◽

Vol 43 (3) ◽

pp. 273-285 ◽

Cited By ~ 19

Author(s):

Lu Pei-Qi ◽

Gong Pei-Zhong ◽

Lin Tie-Zheng ◽

R.S. Houk

Keyword(s):

Electron Temperature ◽

Langmuir Probe ◽

Inductively Coupled Plasma ◽

Inductively Coupled ◽

Langmuir Probe Measurements ◽

Probe Measurements

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Hot Langmuir probe measurements in a chemically reactive plasma and accurate evaluation of the electron energy distribution function

Vacuum ◽

10.1016/s0042-207x(98)00139-0 ◽

1998 ◽

Vol 51 (2) ◽

pp. 89-97 ◽

Cited By ~ 15

Author(s):

Ts Popov ◽

I Petkov

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Langmuir Probe ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Accurate Evaluation ◽

Reactive Plasma ◽

Langmuir Probe Measurements ◽

Probe Measurements

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