Fabrication of a GaAs Microwave Probe Used for Atomic Force Microscope

2007 ◽  
Author(s):  
Yang Ju ◽  
Tetsuya Kobayashi ◽  
Hitoshi Soyama
Keyword(s):  
Aspect Ratio ◽  
Atomic Force Microscope ◽  
Open Structure ◽  
Au Film ◽  
Gaas Wafer ◽  
Atomic Force ◽  
Afm Probe ◽  
Microwave Probe

In order to develop a new structure microwave probe, the fabrication of AFM probe on the GaAs wafer was studied. A waveguide was introduced by evaporating Au film on the top and bottom surfaces of the GaAs AFM probe. A tip having 7 μm high, 2.0 aspect ratio was formed. The dimensions of the cantilever are 250×30×15 μm. The open structure of the waveguide at the tip of the probe was obtained by using FIB fabrication. AFM topographies of a grating sample were measured by using the fabricated GaAs microwave probe and commercial Si AFM probe. The fabricated probe was found having similar capability as the commercial one.

Optimization of the Tip of Microwave AFM Probe

2009 ◽  
Author(s):  
Yang Ju ◽  
Motohiro Hamada ◽  
Atsushi Hosoi ◽  
Akifumi Fujimoto
Keyword(s):  
Metal Film ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Curvature Radius ◽  
Signal To Noise ◽  
Au Film ◽  
Gaas Wafer ◽  
Atomic Force ◽  
Afm Probe ◽  
Microwave Probe

In order to develop a new structure microwave probe, the fabrication of the atomic force microscope (AFM) probe on a GaAs wafer was studied. The fabricated probe had a tip of 8 μm high and curvature radius approximately 30 nm. The dimensions of the cantilever are 250 × 30 × 15 μm. A waveguide was introduced by evaporating Au film on the top and bottom surfaces of the GaAs AFM probe. The open structure of the waveguide at the tip of the probe was introduced by using focused ion beam (FIB) fabrication. To improve the resolution of AFM measurement, only the metal film was removed at the end of the probe tip. AFM topography of a grating sample was measured by the fabricated probe. As a result, it was found that the resolution of AFM measurement and the ratio of signal to noise were enhanced.

Fabrication of the Tip of GaAs Microwave Probe by Wet Etching

2005 ◽  
Author(s):  
Yang Ju ◽  
Hiroyuki Sato ◽  
Hitoshi Soyama
Keyword(s):  
Aspect Ratio ◽  
Wet Etching ◽  
Experimental Result ◽  
Wafer Surface ◽  
Curvature Radius ◽  
Gaas Wafer ◽  
Etching Mask ◽  
Afm Probe ◽  
Microwave Probe ◽  
Atom Force Microscope

In order to develop a new structure microwave probe, the fabrication of micro tip on the GaAs wafer surface was studied. The effects of the shape, direction, and size of etching mask to the fabricated tip were discussed in details. By finding the most suitable etching conditions, a tip having 7 μm high, 1.4 aspect ratio, and 50 nm curvature radius was formed. The experimental result indicates that the tip having the similar capability to sense the surface topography of materials as that of commercial atom force microscope (AFM) probe.

Towards Automated Nanoassembly With the Atomic Force Microscope: A Versatile Drift Compensation Procedure

2009 ◽  
Vol 131 (6) ◽  
Author(s):  
Florian Krohs ◽  
Cagdas Onal ◽  
Metin Sitti ◽  
Sergej Fatikow
Keyword(s):  
Atomic Force Microscope ◽  
Estimation Method ◽  
Thermal Drift ◽  
Promising Technique ◽  
Drift Estimation ◽  
Atomic Force ◽  
Drift Compensation ◽  
Monte Carlo Localization ◽  
Afm Probe

While the atomic force microscope (AFM) was mainly developed to image the topography of a sample, it has been discovered as a powerful tool also for nanomanipulation applications within the last decade. A variety of different manipulation types exists, ranging from dip-pen and mechanical lithography to assembly of nano-objects such as carbon nanotubes (CNTs), deoxyribonucleic acid (DNA) strains, or nanospheres. The latter, the assembly of nano-objects, is a very promising technique for prototyping nanoelectronical devices that are composed of DNA-based nanowires, CNTs, etc. But, pushing nano-objects in the order of a few nanometers nowadays remains a very challenging, labor-intensive task that requires frequent human intervention. To increase throughput of AFM-based nanomanipulation, automation can be considered as a long-term goal. However, automation is impeded by spatial uncertainties existing in every AFM system. This article focuses on thermal drift, which is a crucial error source for automating AFM-based nanoassembly, since it implies a varying, spatial displacement between AFM probe and sample. A novel, versatile drift estimation method based on Monte Carlo localization is presented and experimental results obtained on different AFM systems illustrate that the developed algorithm is able to estimate thermal drift inside an AFM reliably even with highly unstructured samples and inside inhomogeneous environments.

Carbon Nanotube as Probe for Atomic Force Microscope

2006 ◽  
Vol 315-316 ◽  
pp. 758-761
Author(s):  
Zong Wei Xu ◽  
Ying Chun Liang ◽  
Shen Dong ◽  
Li Qiang Gu ◽  
T. Sun ◽  
...  
Keyword(s):  
Carbon Nanotube ◽  
Aspect Ratio ◽  
Atomic Force Microscope ◽  
Arc Welding ◽  
Metal Film ◽  
Optical Microscope ◽  
Fabrication Method ◽  
Easy Method ◽  
Atomic Force ◽  
Direct View

An improved arc welding method was developed to fabricate carbon nanotube probe under direct view of optical microscope. The new fabrication method here needs not coat silicon probe in advance with metal film, which greatly reduces the fabrication’s difficulty. An easy method for shortening the nanotube probe was also developed. The improved fabrication method here is simple and reliable. The fabricated carbon nanotube probe showed good properties of higher length-to-diameter aspect ratio, better wear characteristics than silicon probe.

Wear Characteristics of Atomic Force Microscope Probe Tips

2005 ◽  
Author(s):  
Koo-Hyun Chung ◽  
Dae-Eun Kim
Keyword(s):  
Electron Microscope ◽  
Atomic Force Microscope ◽  
Atomic Force Microscope Probe ◽  
Wear Characteristics ◽  
Atomic Force ◽  
Transmission Electron ◽  
Afm Probe ◽  
Silicon Silicon ◽  
Microscope Probe ◽  
Scanning Electron

In the field of nanotechnology, Atomic Force Microscope (AFM) which is based on the interactions between an extremely sharp probe tip and specimen, has been widely utilized. In the AFM and AFM-based applications, the probe tip wear problem should be carefully considered. In this work, the wear characteristics of silicon, silicon nitride, and diamond coated probe tip under light loads were investigated. In order to identify the structure of the AFM probe tips as well as the nature of wear, High-Resolution Transmission Electron Microscope (HRTEM) and Field Emission Scanning Electron Microscope (FESEM) analyses were utilized. Using the Archard’s wear equation, the degree of the probe tip wear was quantitatively assessed. Based on the experimental results and analysis, the plausible wear mechanisms of the AFM probe tips were proposed in an effort to understand the nano-scale wear.

Fabrication of Coaxial and Triaxial Atomic Force Microscope Imaging Probes

2014 ◽  
Vol 1712 ◽  
Author(s):  
Keith A. Brown ◽  
Robert M. Westervelt
Keyword(s):  
Atomic Force Microscope ◽  
Physical Vapor Deposition ◽  
Focused Ion Beam ◽  
Imaging Techniques ◽  
Ion Beam ◽  
Atomic Force ◽  
Imaging Probes ◽  
Microscope Imaging ◽  
Afm Probe ◽  
General Method

ABSTRACTHerein, we detail the fabrication of atomic force microscope (AFM) probes that have two and three coaxial electrodes at their tips. This fabrication strategy leverages the availability of conductive AFM probes and encompasses a general method for processing their complex and delicate structure through the deposition of insulating and conductive layers by shadow masked chemical and physical vapor deposition, respectively. Focused ion beam milling is used to expose the two electrode (coaxial) or three electrode (triaxial) structures at the tip of the AFM probe. Finally, we discuss new imaging modalities enabled by these probes including electrically-driven contact resonance imaging for nanoscale mechanical characterization, imaging the local dielectric constant by quantifying the dielectrophoretic force, and trapping functional particles at the tip of a probe using dielectrophoresis. These imaging techniques illustrate the generality and utility of this fabrication approach and suggest that such probes could be widely applied to image many nanoscale materials.

Mechanical properties of high-aspect-ratio atomic-force microscope tips

2002 ◽  
Vol 80 (24) ◽  
pp. 4623-4625 ◽  
Author(s):  
G. Jänchen ◽  
P. Hoffmann ◽  
A. Kriele ◽  
H. Lorenz ◽  
A. J. Kulik ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Aspect Ratio ◽  
Atomic Force Microscope ◽  
High Aspect Ratio ◽  
Atomic Force
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