Electrical and physical characterization of high-k dielectric layers

2002 ◽  
Author(s):  
M. Houssa ◽  
M. Naili ◽  
V.V. Afanas'ev ◽  
M.M. Heyns ◽  
A. Stesmans
Keyword(s):  
Physical Characterization ◽  
Dielectric Layers ◽  
High K ◽  
High K Dielectric

Characterization of Al-Based High-k Stacked Dielectric Layers Deposited on 4H-SiC by Atomic Layer Deposition

2011 ◽  
Vol 679-680 ◽  
pp. 441-444 ◽  
Author(s):  
Muhammad Usman ◽  
T. Pilvi ◽  
Markku Leskelä ◽  
Adolf Schöner ◽  
Anders Hallén
Keyword(s):  
Dielectric Properties ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Dielectric Materials ◽  
Dielectric Layers ◽  
Layer Deposition ◽  
High K ◽  
Current Voltage ◽  
High K Dielectric

Aluminum-based high-k dielectric materials have been studied for their potential use as passivation for SiC devices. Metal-insulator-semiconductor structures were prepared and their dielectric properties were analyzed using capacitance-voltage and current-voltage measurements. Atomic layer deposition was used for the deposition of dielectric layers consisting of AlN with or without a buffer layer of SiO2, and also a stack of alternating AlN and Al2O3 layers. It has been observed that AlN has a polycrystalline structure which provides leakage paths for the current through the grain boundaries. However, adding alternate amorphous layers of Al2O3 prevent this leakage and give better overall dielectric properties. It is also concluded that the breakdown of the dielectric starts from the degradation of the thin interfacial SiO2 layer.

(Invited) Electrical Scanning Probe Microscopy Techniques for the Detailed Characterization of High-k Dielectric Layers

2019 ◽  
Vol 28 (2) ◽  
pp. 139-156 ◽  
Author(s):  
Mathias Rommel ◽  
Vasil Yanev ◽  
Albena Paskaleva ◽  
Tobias Erlbacher ◽  
Martin Lemberger ◽  
...  
Keyword(s):  
Scanning Probe Microscopy ◽  
Scanning Probe ◽  
Detailed Characterization ◽  
Probe Microscopy ◽  
Dielectric Layers ◽  
High K ◽  
High K Dielectric ◽  
Microscopy Techniques

High-k Dielectric Layers for Bioelectronic Applications

2008 ◽  
Vol E91-C (12) ◽  
pp. 1894-1898
Author(s):  
D. BORSTLAP ◽  
J. SCHUBERT ◽  
W. ZANDER ◽  
A. OFFENHAUSSER ◽  
S. INGEBRANDT
Keyword(s):  
Dielectric Layers ◽  
High K ◽  
High K Dielectric

Fabrication and Characterization of High-k Dielectric Nickel Titanate Thin Films Using a Modified Sol-Gel Method

2010 ◽  
Vol 94 (1) ◽  
pp. 250-254 ◽  
Author(s):  
Shiow-Huey Chuang ◽  
Min-Lung Hsieh ◽  
Shih-Chieh Wu ◽  
Hong-Cai Lin ◽  
Tien-Sheng Chao ◽  
...  
Keyword(s):  
Thin Films ◽  
Sol Gel ◽  
Gel Method ◽  
Sol Gel Method ◽  
High K ◽  
Nickel Titanate ◽  
Fabrication And Characterization ◽  
High K Dielectric
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