Dielectric Films for Advanced Microelectronics
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Published By John Wiley & Sons, Ltd

9780470017944, 9780470013601
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Porosity of Low Dielectric Constant Materials

2007 ◽  
pp. 85-136 ◽  
Author(s):  
David W. Gidley ◽  
Hua-Gen Peng ◽  
Richard Vallery ◽  
Christopher L. Soles ◽  
Hae-Jeong Lee ◽  
...  
Keyword(s):  
Dielectric Constant ◽  
Low Dielectric Constant ◽  
Low Dielectric ◽  
Low Dielectric Constant Materials

Integration of Low-k Dielectric Films in Damascene Processes

2007 ◽  
pp. 199-250 ◽  
Author(s):  
R.J.O.M. Hoofman ◽  
V.H. Nguyen ◽  
V. Arnal ◽  
M. Broekaart ◽  
L.G. Gosset ◽  
...  
Keyword(s):  
Dielectric Films ◽  
Low K

Mechanical and Transport Properties of Low-k Dielectrics

2007 ◽  
pp. 137-197 ◽  
Author(s):  
J.L. Plawsky ◽  
R. Achanta ◽  
W. Cho ◽  
O. Rodriguez ◽  
R. Saxena ◽  
...  
Keyword(s):  
Transport Properties ◽  
Low K
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