(Invited) Electrical Scanning Probe Microscopy Techniques for the Detailed Characterization of High-k Dielectric Layers

2019 ◽  
Vol 28 (2) ◽  
pp. 139-156 ◽  
Author(s):  
Mathias Rommel ◽  
Vasil Yanev ◽  
Albena Paskaleva ◽  
Tobias Erlbacher ◽  
Martin Lemberger ◽  
...  
Keyword(s):  
Scanning Probe Microscopy ◽  
Scanning Probe ◽  
Detailed Characterization ◽  
Probe Microscopy ◽  
Dielectric Layers ◽  
High K ◽  
High K Dielectric ◽  
Microscopy Techniques

Characterization of Nanoscale Systems in Biology using Scanning Probe Microscopy Techniques

2007 ◽  
Author(s):  
Anthony W. Coleman ◽  
Adina N. Lazar ◽  
Cecile F. Rousseau ◽  
Sebastien Cecillon ◽  
Patrick Shahgaldian
Keyword(s):  
Scanning Probe Microscopy ◽  
Scanning Probe ◽  
Nanoscale Systems ◽  
Probe Microscopy ◽  
Microscopy Techniques
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