PS-4 GHZ Contour Extensional Mode Aluminum Nitride MEMS Resonators

Heterogeneously Integrated Aluminum Nitride MEMS Resonators and Filters

3D and Circuit Integration of MEMS ◽

10.1002/9783527823239.ch7 ◽

2021 ◽

pp. 113-130

Author(s):

Enes Calayir ◽

Srinivas Merugu ◽

Jaewung Lee ◽

Navab Singh ◽

Gianluca Piazza

Keyword(s):

Aluminum Nitride ◽

Mems Resonators

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Single-chip precision oscillators based on multi-frequency, high-Q aluminum nitride MEMS resonators

TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference ◽

10.1109/sensor.2009.5285626 ◽

2009 ◽

Cited By ~ 29

Author(s):

K. E. Wojciechowski ◽

R. H. Olsson ◽

M. R. Tuck ◽

E. Roherty-Osmun ◽

T. A. Hill

Keyword(s):

Aluminum Nitride ◽

Single Chip ◽

High Q ◽

Mems Resonators

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Researching the Aluminum Nitride Etching Process for Application in MEMS Resonators

Micromachines ◽

10.3390/mi6020281 ◽

2015 ◽

Vol 6 (2) ◽

pp. 281-290 ◽

Cited By ~ 13

Author(s):

Jian Yang ◽

Chaowei Si ◽

Guowei Han ◽

Meng Zhang ◽

Liuhong Ma ◽

...

Keyword(s):

Aluminum Nitride ◽

Etching Process ◽

Mems Resonators

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Monolithic integration of phase change materials and aluminum nitride contour-mode MEMS resonators for highly reconfigurable radio frequency systems

10.17760/d20194504 ◽

2015 ◽

Author(s):

Gwendolyn Eve Hummel

Keyword(s):

Aluminum Nitride ◽

Radio Frequency ◽

Phase Change ◽

Phase Change Materials ◽

Monolithic Integration ◽

Mems Resonators ◽

Reconfigurable Radio ◽

Contour Mode ◽

Radio Frequency Systems

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Super high frequency width extensional aluminum nitride (AlN) MEMS resonators

2009 IEEE International Ultrasonics Symposium ◽

10.1109/ultsym.2009.5441802 ◽

2009 ◽

Cited By ~ 12

Author(s):

K. E. Wojciechowski ◽

R. H. Olsson ◽

C. D. Nordquist ◽

M. R. Tuck

Keyword(s):

Aluminum Nitride ◽

High Frequency ◽

Mems Resonators ◽

Super High Frequency

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Piezoelectric Aluminum Nitride Vibrating Contour-Mode MEMS Resonators

Journal of Microelectromechanical Systems ◽

10.1109/jmems.2006.886012 ◽

2006 ◽

Vol 15 (6) ◽

pp. 1406-1418 ◽

Cited By ~ 393

Author(s):

Gianluca Piazza ◽

Philip J. Stephanou ◽

Albert P. Pisano

Keyword(s):

Aluminum Nitride ◽

Mems Resonators ◽

Contour Mode

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Multi-sensitive temperature sensor platforms using aluminum nitride MEMS resonators

Journal of Micromechanics and Microengineering ◽

10.1088/0960-1317/25/11/115016 ◽

2015 ◽

Vol 25 (11) ◽

pp. 115016 ◽

Cited By ~ 3

Author(s):

Humberto Campanella ◽

Margarita Narducci ◽

Jeffrey B W Soon ◽

Srinivas Merugu ◽

Marco Ferrari ◽

...

Keyword(s):

Aluminum Nitride ◽

Temperature Sensor ◽

Sensor Platforms ◽

Mems Resonators

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Damping in aluminum nitride contour mode MEMS resonators

2017 IEEE 60th International Midwest Symposium on Circuits and Systems (MWSCAS) ◽

10.1109/mwscas.2017.8052857 ◽

2017 ◽

Cited By ~ 1

Author(s):

Jeronimo Segovia-Fernandez

Keyword(s):

Aluminum Nitride ◽

Mems Resonators ◽

Contour Mode

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Phase change material programmable vias for switching and reconfiguration of Aluminum Nitride piezoelectric MEMS resonators

2014 IEEE International Frequency Control Symposium (FCS) ◽

10.1109/fcs.2014.6859996 ◽

2014 ◽

Cited By ~ 6

Author(s):

Gwendolyn Hummel ◽

Yu Hui ◽

Matteo Rinaldi

Keyword(s):

Aluminum Nitride ◽

Phase Change ◽

Phase Change Material ◽

Mems Resonators ◽

Piezoelectric Mems ◽

Change Material

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RF Passive Components Based on Aluminum Nitride Cross-Sectional Lamé-Mode MEMS Resonators

IEEE Transactions on Electron Devices ◽

10.1109/ted.2016.2621660 ◽

2017 ◽

Vol 64 (1) ◽

pp. 237-243 ◽

Cited By ~ 31

Author(s):

Cristian Cassella ◽

Guofeng Chen ◽

Zhenyun Qian ◽

Gwendolyn Hummel ◽

Matteo Rinaldi

Keyword(s):

Aluminum Nitride ◽

Cross Sectional ◽

Passive Components ◽

Mems Resonators

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