Single-chip precision oscillators based on multi-frequency, high-Q aluminum nitride MEMS resonators

TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference ◽

10.1109/sensor.2009.5285626 ◽

2009 ◽

Cited By ~ 29

Author(s):

K. E. Wojciechowski ◽

R. H. Olsson ◽

M. R. Tuck ◽

E. Roherty-Osmun ◽

T. A. Hill

Keyword(s):

Aluminum Nitride ◽

Single Chip ◽

High Q ◽

Mems Resonators

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High-Q MEMS Resonators for Laser Beam Scanning Displays

Micromachines ◽

10.3390/mi3020509 ◽

2012 ◽

Vol 3 (2) ◽

pp. 509-528 ◽

Cited By ~ 68

Author(s):

Ulrich Hofmann ◽

Joachim Janes ◽

Hans-Joachim Quenzer

Keyword(s):

Laser Beam ◽

Beam Scanning ◽

High Q ◽

Mems Resonators ◽

Laser Beam Scanning

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Demonstration of green and UV wavelength high Q aluminum nitride on sapphire microring resonators integrated with microheaters

Applied Physics Letters ◽

10.1063/5.0052163 ◽

2021 ◽

Vol 118 (21) ◽

pp. 211103

Author(s):

Walter Shin ◽

Yi Sun ◽

Mohammad Soltani ◽

Zetian Mi

Keyword(s):

Aluminum Nitride ◽

Microring Resonators ◽

High Q

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Heterogeneously Integrated Aluminum Nitride MEMS Resonators and Filters

3D and Circuit Integration of MEMS ◽

10.1002/9783527823239.ch7 ◽

2021 ◽

pp. 113-130

Author(s):

Enes Calayir ◽

Srinivas Merugu ◽

Jaewung Lee ◽

Navab Singh ◽

Gianluca Piazza

Keyword(s):

Aluminum Nitride ◽

Mems Resonators

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High-Q aluminum nitride photonic crystal nanobeam cavities

Applied Physics Letters ◽

10.1063/1.3690888 ◽

2012 ◽

Vol 100 (9) ◽

pp. 091105 ◽

Cited By ~ 59

Author(s):

W. H. P. Pernice ◽

C. Xiong ◽

C. Schuck ◽

H. X. Tang

Keyword(s):

Photonic Crystal ◽

Aluminum Nitride ◽

High Q ◽

Nanobeam Cavities

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Ultra-High-Q Microring Resonators using Single Crystal Aluminum Nitride on Sapphire Platform

2019 IEEE Photonics Conference (IPC) ◽

10.1109/ipcon.2019.8908293 ◽

2019 ◽

Author(s):

Yi Sun ◽

David Laleyan ◽

Eric Reid ◽

Ping Wang ◽

Xianhe Liu ◽

...

Keyword(s):

Aluminum Nitride ◽

Single Crystal ◽

Microring Resonators ◽

High Q

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Researching the Aluminum Nitride Etching Process for Application in MEMS Resonators

Micromachines ◽

10.3390/mi6020281 ◽

2015 ◽

Vol 6 (2) ◽

pp. 281-290 ◽

Cited By ~ 13

Author(s):

Jian Yang ◽

Chaowei Si ◽

Guowei Han ◽

Meng Zhang ◽

Liuhong Ma ◽

...

Keyword(s):

Aluminum Nitride ◽

Etching Process ◽

Mems Resonators

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Orientation dependence of nonlinearity and TCf in high-Q shear-modes of silicon MEMS resonators

2014 IEEE International Frequency Control Symposium (FCS) ◽

10.1109/fcs.2014.6859981 ◽

2014 ◽

Cited By ~ 6

Author(s):

Haoshen Zhu ◽

Joshua E.-Y. Lee

Keyword(s):

Orientation Dependence ◽

High Q ◽

Mems Resonators ◽

Shear Modes

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High Q micro-ring resonators fabricated from polycrystalline aluminum nitride films for near infrared and visible photonics

Optics Express ◽

10.1364/oe.20.012261 ◽

2012 ◽

Vol 20 (11) ◽

pp. 12261 ◽

Cited By ~ 36

Author(s):

Wolfram H.P. Pernice ◽

Chi Xiong ◽

Hong X. Tang

Keyword(s):

Aluminum Nitride ◽

Near Infrared ◽

Ring Resonators ◽

Polycrystalline Aluminum ◽

High Q

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Design Sensitivity Analysis for the Performance Improvement of High-Q MEMS Resonators

43rd AIAA/ASME/ASCE/AHS/ASC Structures, Structural Dynamics, and Materials Conference ◽

10.2514/6.2002-1351 ◽

2002 ◽

Author(s):

Yong-Hwa Park ◽

K.C. Park

Keyword(s):

Sensitivity Analysis ◽

Performance Improvement ◽

Design Sensitivity ◽

Design Sensitivity Analysis ◽

High Q ◽

Mems Resonators

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Differentially piezoresistive transduction of high-q encapsulated SOI-MEMS resonators with sub-100 nm gaps

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control ◽

10.1109/tuffc.2014.006470 ◽

2015 ◽

Vol 62 (1) ◽

pp. 220-229 ◽

Cited By ~ 2

Author(s):

Cheng-Syun Li ◽

Ming-Huang Li ◽

Sheng-Shian Li

Keyword(s):

High Q ◽

Mems Resonators

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