Near-Field Scanning Microwave Microscope for Interline Capacitance Characterization of Nanoelectronics Interconnect
2009 ◽
Vol 57
(5)
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pp. 1224-1229
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2012 ◽
Vol 83
(8)
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pp. 083702
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2007 ◽
Vol 20
(1)
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pp. 80-85
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2003 ◽
Vol 51
(1)
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pp. 91-99
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Keyword(s):
Keyword(s):
2011 ◽
Vol 161
(11-12)
◽
pp. 931-936
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Keyword(s):
Keyword(s):