A Dual-Mode Built-in Self-Test Technique for Capacitive MEMS Devices

2005 ◽  
Vol 54 (5) ◽  
pp. 1739-1750 ◽  
Author(s):  
X. Xiong ◽  
Y.-L. Wu ◽  
W.-B. Jone
Author(s):  
I. Voyiatzis ◽  
D. Nikolos ◽  
A. Paschalis ◽  
C. Halatsis ◽  
T. Haniotakis

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