A New Cost-Effective Metal–Insulator–Metal Capacitor Processed at 350 $^{\circ}\hbox{C}$ Using $ \hbox{Ni}_{2}\hbox{Si}$ Fully Silicided Amorphous Silicon Electrodes
2011 ◽
Vol 58
(3)
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pp. 672-676
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2011 ◽
Vol 58
(11)
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pp. 3920-3924
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2014 ◽
Vol 4
(2)
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pp. 110-121
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Keyword(s):
Keyword(s):
2021 ◽
Vol 4
(3)
◽
pp. 2470-2475
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Keyword(s):