Fowler-Nordheim and hot-carrier stress study of latent plasma charging damage in various 50 Å gate dielectrics

Author(s):  
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J. Huber ◽  
J. Walls
2004 ◽  
Vol 72 (1-4) ◽  
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Author(s):  
G Ribes ◽  
S Bruyère ◽  
M Denais ◽  
F Monsieur ◽  
V Huard ◽  
...  

1988 ◽  
Vol 49 (C4) ◽  
pp. C4-779-C4-782 ◽  
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Vol 74 ◽  
pp. 74-80 ◽  
Author(s):  
Lihua Dai ◽  
Xiaonian Liu ◽  
Mengying Zhang ◽  
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...  

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