Fowler-Nordheim and hot-carrier stress study of latent plasma charging damage in various 50 Å gate dielectrics
1994 ◽
Vol 41
(5)
◽
pp. 671-674
◽
2004 ◽
Vol 72
(1-4)
◽
pp. 10-15
◽
1988 ◽
Vol 49
(C4)
◽
pp. C4-779-C4-782
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Keyword(s):
2017 ◽
Vol 74
◽
pp. 74-80
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2002 ◽
Vol 17
(5)
◽
pp. 487-492
◽
1992 ◽
Vol 39
(7)
◽
pp. 1774-1776
◽