CMOS-compatible surface-micromachined suspended-spiral inductors for multi-GHz silicon RF ICs

Jun-Bo Yoon;  Yun-Seok Choi;  Byeong-Il Kim;  Yunseong Eo;  Euisik Yoon

doi:10.1109/led.2002.803767

CMOS-compatible surface-micromachined suspended-spiral inductors for multi-GHz silicon RF ICs

IEEE Electron Device Letters ◽

10.1109/led.2002.803767 ◽

2002 ◽

Vol 23 (10) ◽

pp. 591-593 ◽

Cited By ~ 98

Author(s):

Jun-Bo Yoon ◽

Yun-Seok Choi ◽

Byeong-Il Kim ◽

Yunseong Eo ◽

Euisik Yoon

Keyword(s):

Spiral Inductors ◽

Cmos Compatible ◽

Rf Ics

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Refined Wide Band Modelling and Design of CMOS-Compatible Spiral Inductors with BCB Dielectric Layer

33rd European Microwave Conference, 2003 ◽

10.1109/euma.2003.340825 ◽

2003 ◽

Author(s):

Yuri Tikhov ◽

Dongha Shim ◽

Kuang Woo Nam ◽

Insang Song

Keyword(s):

Dielectric Layer ◽

Wide Band ◽

Spiral Inductors ◽

Cmos Compatible

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CMOS-Compatible Suspended Square Inductors on Silicon Wafers for RF ICs

10.7567/ssdm.2006.a-3-2 ◽

2006 ◽

Author(s):

Chih-Ming Tai ◽

Chien-Neng Liao

Keyword(s):

Silicon Wafers ◽

Cmos Compatible ◽

Rf Ics

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Experimental Analysis of the Effect of Metal Thickness on the Quality Factor in Integrated Spiral Inductors for RF ICs

IEEE Electron Device Letters ◽

10.1109/led.2003.822652 ◽

2004 ◽

Vol 25 (2) ◽

pp. 76-79 ◽

Cited By ~ 53

Author(s):

Y.-S. Choi ◽

J.-B. Yoon

Keyword(s):

Quality Factor ◽

Experimental Analysis ◽

Metal Thickness ◽

Spiral Inductors ◽

Rf Ics

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A simple and complete circuit model for the coupling between symmetrical spiral inductors in silicon RF-ICs

2008 IEEE Radio Frequency Integrated Circuits Symposium ◽

10.1109/rfic.2008.4561481 ◽

2008 ◽

Cited By ~ 4

Author(s):

F. Vecchi ◽

M. Repossi ◽

A. Mazzanti ◽

P. Arcioni ◽

F. Svelto

Keyword(s):

Circuit Model ◽

Spiral Inductors ◽

Complete Circuit ◽

Rf Ics

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Refined wide band modelling and design of CMOS-compatible spiral inductors with BCB dielectric layer

33rd European Microwave Conference, 2003 ◽

10.1109/eumc.2003.1262217 ◽

2004 ◽

Author(s):

Y. Tikhov ◽

D. Shim ◽

K.W. Nam ◽

I. Song

Keyword(s):

Dielectric Layer ◽

Wide Band ◽

Spiral Inductors ◽

Cmos Compatible

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High-Q CMOS-compatible micromachined edge-suspended spiral inductors

2004 IEE Radio Frequency Integrated Circuits (RFIC) Systems Digest of Papers RFIC-04 ◽

10.1109/rfic.2004.1320590 ◽

2004 ◽

Author(s):

Wai Cheong Hon ◽

Jinwen Zhang ◽

L.L.W. Leung ◽

K.J. Chen

Keyword(s):

High Q ◽

Spiral Inductors ◽

Cmos Compatible

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Optimal Design of Spiral Inductors on Silicon Substrates for RF ICs

Journal of the Korean Institute of Electrical and Electronic Material Engineers ◽

10.4313/jkem.2005.18.3.216 ◽

2005 ◽

Vol 18 (3) ◽

pp. 216-218 ◽

Cited By ~ 1

Author(s):

Yeong-Joo Moon ◽

Moon-Ho Choi ◽

Kee-Yeol Na ◽

Nam-Su Kim ◽

Yeong-Seuk Kim

Keyword(s):

Optimal Design ◽

Silicon Substrates ◽

Spiral Inductors ◽

Rf Ics

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The detailed analysis of high Q CMOS-compatible microwave spiral inductors in silicon technology

IEEE Transactions on Electron Devices ◽

10.1109/16.711361 ◽

1998 ◽

Vol 45 (9) ◽

pp. 1953-1959 ◽

Cited By ~ 54

Author(s):

Min Park ◽

Seonghearn Lee ◽

Cheon Soo Kim ◽

Hyun Kyu Yu ◽

Kee Soo Nam

Keyword(s):

Detailed Analysis ◽

High Q ◽

Silicon Technology ◽

Spiral Inductors ◽

Cmos Compatible

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CMOS-Compatible Micromachined Edge-Suspended Spiral Inductors With High Q-Factors and Self-Resonance Frequencies

IEEE Electron Device Letters ◽

10.1109/led.2004.829004 ◽

2004 ◽

Vol 25 (6) ◽

pp. 363-365 ◽

Cited By ~ 20

Author(s):

K.J. Chen ◽

W.C. Hon ◽

J. Zhang ◽

L.L.W. Leung

Keyword(s):

High Q ◽

Resonance Frequencies ◽

Spiral Inductors ◽

Cmos Compatible ◽

Q Factors

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Systematic Experimental and Numerical Characterization of Integrated Spiral Inductors in Silicon RF ICs

10.1109/euma.2002.339375 ◽

2002 ◽

Author(s):

V. Palazzari ◽

P. Placidi ◽

G. Stopponi ◽

F. Alimenti ◽

A. Scorzoni ◽

...

Keyword(s):

Numerical Characterization ◽

Spiral Inductors ◽

Rf Ics

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