The detailed analysis of high Q CMOS-compatible microwave spiral inductors in silicon technology

1998 ◽  
Vol 45 (9) ◽  
pp. 1953-1959 ◽  
Author(s):  
Min Park ◽  
Seonghearn Lee ◽  
Cheon Soo Kim ◽  
Hyun Kyu Yu ◽  
Kee Soo Nam
Keyword(s):  
Detailed Analysis ◽  
High Q ◽  
Silicon Technology ◽  
Spiral Inductors ◽  
Cmos Compatible

High Q CMOS-compatible microwave inductors using double-metal interconnection silicon technology

1997 ◽  
Vol 7 (2) ◽  
pp. 45-47 ◽  
Author(s):  
Min Park ◽  
Seonghearn Lee ◽  
Hyun Kyu Yu ◽  
Jin Gun Koo ◽  
Kee Soo Nam
Keyword(s):  
High Q ◽  
Silicon Technology ◽  
Cmos Compatible

High Q broadband copper spiral inductors with Q=45 on proton-bombarded semi-insulating silicon substrate

2003 ◽  
Author(s):  
Heng-Ming Hsu ◽  
Jiong-Guang Su ◽  
Yo-Sheng Lin ◽  
Ming-Hao Tseng ◽  
Jason Chih-Hsien Lin ◽  
...  
Keyword(s):  
Silicon Substrate ◽  
High Q ◽  
Spiral Inductors

scholarly journals CMOS compatible high-Q photonic crystal nanocavity fabricated with photolithography on silicon photonic platform

2015 ◽  
Vol 5 (1) ◽  
Author(s):  
Yuta Ooka ◽  
Tomohiro Tetsumoto ◽  
Akihiro Fushimi ◽  
Wataru Yoshiki ◽  
Takasumi Tanabe
Keyword(s):  
Photonic Crystal ◽  
High Q ◽  
Silicon Photonic ◽  
Cmos Compatible

Low-Loss Silicon Technology for High-Q Bright Quantum Sources

2019 ◽  
Author(s):  
H. El Dirani ◽  
D. Bajoni ◽  
C. Sciancalepore ◽  
F. A. Sabattoli ◽  
F. Garrisi ◽  
...  
Keyword(s):  
Low Loss ◽  
High Q ◽  
Silicon Technology

Grating Metal Structure with Low-K BCB and Electroplated Copper for High-Q Spiral Inductors

2005 ◽  
Author(s):  
Sung-Ku Yeo ◽  
Seong-Ho Shin ◽  
Ju-Hyang Lee ◽  
Young-Se Kwon
Keyword(s):  
Metal Structure ◽  
High Q ◽  
Spiral Inductors ◽  
Electroplated Copper ◽  
Low K

CMOS-Compatible High-Q Photonic Crystal Cavities

2018 ◽  
Author(s):  
Delphin Dodane ◽  
Jerôme Bourderionnnet ◽  
Sylvain Combrié ◽  
Alfredo De Rossi
Keyword(s):  
Photonic Crystal ◽  
Photonic Crystal Cavities ◽  
High Q ◽  
Cmos Compatible
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