High-sensitivity porous silicon photodetectors fabricated through rapid thermal oxidation and rapid thermal annealing

1997 ◽  
Vol 33 (12) ◽  
pp. 2199-2202 ◽  
Author(s):  
M.K. Lee ◽  
Y.H. Wang ◽  
C.H. Chu
Keyword(s):  
Porous Silicon ◽  
Thermal Oxidation ◽  
Thermal Annealing ◽  
Rapid Thermal Annealing ◽  
High Sensitivity ◽  
Rapid Thermal Oxidation

Rapid Thermal Annealing and Oxidation of Silicon Wafers with Back-Side Films

1997 ◽  
Vol 470 ◽  
Author(s):  
A. T. Fiory
Keyword(s):  
Thermal Oxidation ◽  
Sheet Resistance ◽  
Thermal Annealing ◽  
Rapid Thermal Annealing ◽  
Temperature Control ◽  
Thermal Processing ◽  
Rapid Thermal Processing ◽  
Oxide Thickness ◽  
Back Side ◽  
Control Accuracy

ABSTRACTTemperatures for lamp-heated rapid thermal processing of wafers with various back-side films were controlled by a Lucent Technologies pyrometer which uses a/c lamp ripple to compensate for emissivity. Process temperatures for anneals of arsenic and boron implants were inferred from post-anneal sheet resistance, and for rapid thermal oxidation, from oxide thickness. Results imply temperature control accuracy of 12°C to 17°C at 3 standard deviations.

Stable and intense blue-green emission in porous silicon achieved by amine immersion and rapid thermal oxidation

1997 ◽  
Vol 70 (10) ◽  
pp. 1284-1286 ◽  
Author(s):  
Gu-Bo Li ◽  
Liang-Sheng Liao ◽  
Xiao-Bing Liu ◽  
Xiao-Yuan Hou ◽  
Xun Wang
Keyword(s):  
Porous Silicon ◽  
Thermal Oxidation ◽  
Green Emission ◽  
Rapid Thermal Oxidation

SiGe Nanocrystals Fabricated by One-Step Thermal Oxidation and Rapid Thermal Annealing

2008 ◽  
Vol 11 (4) ◽  
pp. K44 ◽  
Author(s):  
Chyuan Haur Kao ◽  
Chao Sung Lai ◽  
M. C. Tsai ◽  
K. M. Fan ◽  
C. H. Lee ◽  
...  
Keyword(s):  
Thermal Oxidation ◽  
Thermal Annealing ◽  
Rapid Thermal Annealing ◽  
One Step

Photoluminescence of porous-silicon/diamondlike-carbon-film structures subjected to rapid thermal annealing

1999 ◽  
Vol 25 (4) ◽  
pp. 304-306 ◽  
Author(s):  
A. G. Rozhin ◽  
N. I. Klyui ◽  
Yu. P. Piryatinskii ◽  
V. A. Semenovich
Keyword(s):  
Porous Silicon ◽  
Thermal Annealing ◽  
Rapid Thermal Annealing ◽  
Carbon Film ◽  
Diamondlike Carbon
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