rapid thermal oxidation
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Fabrication of Epitaxial Cu$_{2}$O (111) Films from Cu(111) thin Films by Rapid Thermal Oxidation

2020 ◽  
Vol 70 (11) ◽  
pp. 914-919
Author(s):  
Miyeon CHEON ◽  
Yousil LEE ◽  
Sujae KIM ◽  
Se Young jeong*
Keyword(s):  
Thin Films ◽  
Thermal Oxidation ◽  
Rapid Thermal Oxidation

Characteristics of Titanium Oxide Gate Nmosfet Formed by E-Beam Evaporation with Additional Rapid Thermal Oxidation and Annealing

2019 ◽  
Vol 14 (1) ◽  
pp. 327-333
Author(s):  
Angélica D. Barros ◽  
Juliana Miyoshi ◽  
Ricardo Wada ◽  
F. A. Cavarsan ◽  
Ioshiaki Doi ◽  
...  
Keyword(s):  
Thermal Oxidation ◽  
Titanium Oxide ◽  
Rapid Thermal Oxidation

Control of grown-in defects and oxygen precipitates in silicon wafers with DZ-IG structure by ultrahigh-temperature rapid thermal oxidation

2018 ◽  
Vol 123 (16) ◽  
pp. 161591 ◽  
Author(s):  
Susumu Maeda ◽  
Haruo Sudo ◽  
Hideyuki Okamura ◽  
Kozo Nakamura ◽  
Koji Sueoka ◽  
...  
Keyword(s):  
Thermal Oxidation ◽  
Silicon Wafers ◽  
Rapid Thermal Oxidation ◽  
Ultrahigh Temperature ◽  
Oxygen Precipitates

Rapid Thermal Oxidation of Sputtering Power Dependent Vanadium Thin Films for VO2Thin Films Preparation

2018 ◽  
Vol 7 (8) ◽  
pp. P429-P434 ◽  
Author(s):  
Jiran Liang ◽  
Yirui Zhao ◽  
Jinbang Guo ◽  
Zhibin Yang ◽  
Tianyu Su
Keyword(s):  
Thin Films ◽  
Thermal Oxidation ◽  
Rapid Thermal Oxidation ◽  
Sputtering Power

Oxidation kinetics of Si and SiGe by dry rapid thermal oxidation, in-situ steam generation oxidation and dry furnace oxidation

2017 ◽  
Vol 121 (24) ◽  
pp. 245308 ◽  
Author(s):  
Fabien Rozé ◽  
Olivier Gourhant ◽  
Elisabeth Blanquet ◽  
François Bertin ◽  
Marc Juhel ◽  
...  
Keyword(s):  
Thermal Oxidation ◽  
Oxidation Kinetics ◽  
Steam Generation ◽  
Rapid Thermal Oxidation ◽  
Kinetics Of

Ultrahigh-temperature rapid thermal oxidation of 4H-SiC(0001) surfaces and oxidation temperature dependence of SiO2/SiC interface properties

2016 ◽  
Vol 109 (18) ◽  
pp. 182114 ◽  
Author(s):  
Takuji Hosoi ◽  
Daisuke Nagai ◽  
Mitsuru Sometani ◽  
Yoshihito Katsu ◽  
Hironori Takeda ◽  
...  
Keyword(s):  
Temperature Dependence ◽  
Thermal Oxidation ◽  
Oxidation Temperature ◽  
Interface Properties ◽  
Rapid Thermal Oxidation ◽  
Ultrahigh Temperature
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