The generation and characterization of electron and hole traps created by hole injection during low gate voltage hot-carrier stressing of n-MOS transistors

1990 ◽  
Vol 37 (8) ◽  
pp. 1869-1876 ◽  
Author(s):  
B.S. Doyle ◽  
M. Bourcerie ◽  
C. Bergonzoni ◽  
R. Benecchi ◽  
A. Bravis ◽  
...  
1998 ◽  
Vol 513 ◽  
Author(s):  
P. J. Chen ◽  
R. M. Wallace

ABSTRACTPassivation of the SiO2-Si interface by hydrogen/deuterium in MOS transistors serve to ensure their operating reliability against channel hot carriers. Physical characterization of device sintering process in deuterated forming gas (10%D2:90%N2) is carried out by dynamic SIMS on planar CMOS gate stack structures, in conjunction with device hot carrier electrical testing. It is found that incorporation of deuterium in the doped poly-Si/SiO2/Si interfacial region readily occurs under typical post-metallization sintering conditions, demonstrating that transport of deuterium through CMOS gate is an effective pathway in an encapsulated device structure with silicon nitride sidewalls. The measured Si-D areal densities in the interfacial region depend on gate poly-Si doping type, but in both cases, appear to be sufficient to achieve complete interface Si dangling bond (˜1012 cm−2) passivation for the SiO2-Si system.


1988 ◽  
Vol 49 (C4) ◽  
pp. C4-651-C4-655 ◽  
Author(s):  
R. BELLENS ◽  
P. HEREMANS ◽  
G. GROESENEKEN ◽  
H. E. MAES

2012 ◽  
Vol 11 (04) ◽  
pp. 1240021
Author(s):  
GUILLAUME LAFFITE ◽  
XU ZHENG ◽  
LOUIS RENAUD ◽  
FRANÇOIS BESSUEILLE ◽  
ELISABETH CHARLAIX ◽  
...  

We present an experimental study on the electrofluidic transistor in this paper. A novel and easy way to integrate the transistor into a microchannel is developed. The performances of the insulating layer, especially the leakage current under gate voltage, are carefully characterized. The change of surface charge on silica surface by gate polarization is measured, however, by measuring the streaming current, the gating effect on zeta potential has not been observed. This result should imply new assumption in the understanding of the charge regulation in the electrical double layer under gate polarization.


2018 ◽  
Vol 33 (12) ◽  
pp. 125019
Author(s):  
Yen-Lin Tsai ◽  
Jone F Chen ◽  
Shang-Feng Shen ◽  
Hao-Tang Hsu ◽  
Chia-Yu Kao ◽  
...  

2001 ◽  
Vol 48 (2) ◽  
pp. 300-306 ◽  
Author(s):  
Cherng-Ming Yih ◽  
Zhi-Hao Ho ◽  
Mong-Song Liang ◽  
S.S. Chung

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