Optical and physicochemical properties of hydrogenated silicon nitride thin films: Effect of the thermal annealing
Keyword(s):
1993 ◽
pp. 421-426
Keyword(s):
Keyword(s):
1995 ◽
Vol 56
(2)
◽
pp. 293-299
◽
Keyword(s):
2009 ◽
Vol 21
(9)
◽
pp. 095010
◽
2007 ◽
Vol 51
(5)
◽
pp. 1659-1662
◽
Keyword(s):
Keyword(s):
Keyword(s):
Keyword(s):