Effect of the RF bias on the plasma density in an argon inductively coupled plasma

2020 ◽  
Vol 27 (9) ◽  
pp. 093508
Author(s):  
Ho-won Lee ◽  
Kyung-Hyun Kim ◽  
Jong In Seo ◽  
Chin-Wook Chung
Keyword(s):  
Plasma Density ◽  
Inductively Coupled Plasma ◽  
Inductively Coupled

Nonlinear enhancement of plasma density in linear combination of multiple collisional internal inductively coupled plasma sources

2010 ◽  
Vol 17 (10) ◽  
pp. 103503 ◽  
Author(s):  
Zhipeng Chen ◽  
Hong Li ◽  
Bin Li ◽  
Chen Luo ◽  
Jinlin Xie ◽  
...  
Keyword(s):  
Linear Combination ◽  
Plasma Density ◽  
Inductively Coupled Plasma ◽  
Plasma Sources ◽  
Inductively Coupled

Relation between the CF2 radical and plasma density measured using LIF and cutoff probe in a CF4 inductively coupled plasma

2004 ◽  
Vol 85 (11) ◽  
pp. 1922-1924 ◽  
Author(s):  
Jung-Hyung Kim ◽  
Yong-Hyeon Shin ◽  
Kwang-Hwa Chung ◽  
Yong-Shim Yoo
Keyword(s):  
Plasma Density ◽  
Inductively Coupled Plasma ◽  
Inductively Coupled
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