Role of experimental resolution in measurements of critical layer thickness for strained‐layer epitaxy

1987 ◽  
Vol 51 (14) ◽  
pp. 1080-1082 ◽  
Author(s):  
I. J. Fritz
Keyword(s):  
Layer Thickness ◽  
Critical Layer ◽  
Critical Layer Thickness ◽  
Strained Layer ◽  
Experimental Resolution

Critical Layer Thickness: Theory and Experiment in the ZnSe/GaAs (001) Material System

2017 ◽  
Vol 26 (03) ◽  
pp. 1740020
Author(s):  
Tedi Kujofsa ◽  
John E. Ayers
Keyword(s):  
Layer Thickness ◽  
Flow Model ◽  
Driving Forces ◽  
Lattice Relaxation ◽  
Theoretical Models ◽  
Critical Layer ◽  
Material System ◽  
Critical Layer Thickness ◽  
Experimental Resolution ◽  
Experimental Strain

The critical layer thickness (CLT) determines the criteria for dislocation formation and the onset of lattice relaxation. Although several theoretical models have been developed for the critical layer thickness, experimentally-measured CLTs in ZnSe/GaAs (001) heterostructures are often at variance with one another as well as with established theories. In a previous work [T. Kujofsa et al., J. Vac. Sci. Technol. B, 34, 051201 (2016)], we showed that the experimentally measured CLT may be much larger than the equilibrium value when using finite experimental resolution. In this work, we apply a general dislocation flow model to determine the apparent critical layer thickness as a function of the experimental resolution for ZnSe/GaAs (001) heterostructures. More importantly, we compare the results utilizing different equilibrium theories and therefore varying driving forces for the lattice relaxation in order to determine which established models are consistent with several measured values of CLT for ZnSe/GaAs (001) once kinetically-limited relaxation and finite experimental strain resolution are taken into account.

Controversy of critical layer thickness for InGaAs/GaAs strained‐layer epitaxy

1988 ◽  
Vol 52 (5) ◽  
pp. 377-379 ◽  
Author(s):  
P. L. Gourley ◽  
I. J. Fritz ◽  
L. R. Dawson
Keyword(s):  
Layer Thickness ◽  
Critical Layer ◽  
Critical Layer Thickness ◽  
Strained Layer

Dependence of critical layer thickness on strain for InxGa1−xAs/GaAs strained‐layer superlattices

1985 ◽  
Vol 46 (10) ◽  
pp. 967-969 ◽  
Author(s):  
I. J. Fritz ◽  
S. T. Picraux ◽  
L. R. Dawson ◽  
T. J. Drummond ◽  
W. D. Laidig ◽  
...  
Keyword(s):  
Layer Thickness ◽  
Critical Layer ◽  
Critical Layer Thickness ◽  
Strained Layer ◽  
Strained Layer Superlattices
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