Experimental investigations of the effect of the neutral gas pressure on the separate control of ion energy and flux in dual frequency capacitively coupled plasmas

2019 ◽  
Vol 26 (8) ◽  
pp. 083505 ◽  
Author(s):  
Partha Saikia ◽  
Heman Bhuyan ◽  
Seong Ling Yap ◽  
Miguel Escalona ◽  
Mario Favre ◽  
...  
Keyword(s):  
Gas Pressure ◽  
Experimental Investigations ◽  
Dual Frequency ◽  
Ion Energy ◽  
Capacitively Coupled ◽  
Neutral Gas ◽  
Separate Control ◽  
Coupled Plasmas

Effects of gas pressure on 60/13.56 MHz dual-frequency capacitively coupled plasmas

2011 ◽  
Vol 18 (5) ◽  
pp. 053501 ◽  
Author(s):  
Q. H. Yuan ◽  
G. Q. Yin ◽  
Y. Xin ◽  
Z. Y. Ning
Keyword(s):  
Gas Pressure ◽  
Dual Frequency ◽  
Capacitively Coupled ◽  
Coupled Plasmas

Phase modulation in pulsed dual-frequency capacitively coupled plasmas

2014 ◽  
Vol 115 (23) ◽  
pp. 233303 ◽  
Author(s):  
De-Qi Wen ◽  
Quan-Zhi Zhang ◽  
Wei Jiang ◽  
Yuan-Hong Song ◽  
Annemie Bogaerts ◽  
...  
Keyword(s):  
Phase Modulation ◽  
Dual Frequency ◽  
Capacitively Coupled ◽  
Coupled Plasmas
Sign in / Sign up

Export Citation Format

Share Document