The effect of secondary electrons on the separate control of ion energy and flux in dual-frequency capacitively coupled radio frequency discharges

2010 ◽  
Vol 97 (8) ◽  
pp. 081501 ◽  
Author(s):  
Z. Donkó ◽  
J. Schulze ◽  
P. Hartmann ◽  
I. Korolov ◽  
U. Czarnetzki ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Dual Frequency ◽  
Secondary Electrons ◽  
Ion Energy ◽  
Capacitively Coupled ◽  
Separate Control ◽  
Radio Frequency Discharges

scholarly journals Space and phase resolved plasma parameters in an industrial dual-frequency capacitively coupled radio-frequency discharge

2007 ◽  
Vol 40 (22) ◽  
pp. 7008-7018 ◽  
Author(s):  
J Schulze ◽  
T Gans ◽  
D O'Connell ◽  
U Czarnetzki ◽  
A R Ellingboe ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Dual Frequency ◽  
Plasma Parameters ◽  
Capacitively Coupled ◽  
Radio Frequency Discharge

scholarly journals Heavy-particle induced secondary electrons in capacitive radio frequency discharges driven by tailored voltage waveforms

2019 ◽  
Vol 126 (4) ◽  
pp. 043303 ◽  
Author(s):  
A. Derzsi ◽  
B. Horváth ◽  
I. Korolov ◽  
Z. Donkó ◽  
J. Schulze
Keyword(s):  
Radio Frequency ◽  
Heavy Particle ◽  
Secondary Electrons ◽  
Radio Frequency Discharges
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